Fei Comapny

Phenom-World Holding B.v.

Sander Richard Marie Stoks

Cornelis Sander Kooijman

Bart Buijsse

Colin Sanford

Steven Berger

Hendrik Gezinus Tappel

Hugo Van Leeuwen

Ben Jacobus Marie Bormans

Koen Arnoldus Wilhelmus Driessen

Karel D Van Der Mast

Martinus Petrus Maria Bierhoff

Adrianus Franciscus Johannes Hammen

Wilhelmus Henrica Cornelis Theuws

Johannes Antonius Hendricus W G Persoon

Johannes Antonius Hendricus Wilhelmus Gerardus Persoon

Ton Antonius Cornelis Henricus Kluijtmans

Gerhardus Bernardus Stamsnijder

Johannes Antonius Hendricus Wg Persoon

Paul Cornelis Maria Van Den Bos

Mart Petrus Maria Bierhoff

Colin August Sanford

Karel Diederick Van Der Mast

Johannes Antonius Hendricus WG Persoon

Johannes AHWG Persoon

Johannes Antonius Hendricus Wilhelmus G Persoon

A scanning electron microscope. The scanning electron microscope may include a sliding vacuum seal between the electron optical imaging system and the sample carrier with a first plate having a first aperture associated with the electron optical imaging system and resting against a second plate having a second aperture associated with the sample carrier. The first plate and/or the second plate includes a groove circumscribing the first and/or second aperture. The scanning electron microscope may include a detector movable relative to the electron beam. The scanning electron microscope may include a motion control unit for moving a sample carrier along a collision free path.

Scanning electron microscope

A scanning electron microscope () including a sliding vacuum seal () between an electron optical imaging system () and a sample carrier () with a first plate () having a first aperture () associated with the electron optical imaging system and resting against a second plate () having a second aperture () associated with the sample carrier. The first plate and/or the second plate includes a groove () circumscribing the first and/or second aperture. The scanning electron microscope may include a detector () movable relative to the electron beam. The scanning electron microscope may include a motion control unit for moving a sample carrier along a collision free path.

Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.

Sample stage

A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

User interface for an electron microscope

Information from multiple detectors acquiring different types of information is combined to determine one or more properties of a sample more efficiently than the properties could be determined using a single type of information from a single type of detector. In some embodiments, information is collected simultaneously from the different detectors which can greatly reduce data acquisition time. In some embodiments, information from different points on the sample are grouped based on information from one type of detector and information from the second type of detector related to these points is combined, for example, to create a single spectrum from a second detector of a region of common composition as determined by the first detector. In some embodiments, the data collection is adaptive, that is, the data is analyzed during collection to determine whether sufficient data has been collected to determine a desired property with the desired confidence.

Clustering of multi-modal data

A method of examining a sample using a spectroscopic apparatus, comprising the following steps:

Spectroscopy technique using merged spectral data

A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

Compact scanning electron microscope

Growing community of inventors

Nijmegen, Netherlands

Sander Richard Marie Stoks