Asml Netherlands B.v.

Sander Jeroen Hermanussen

Hans Butler

Johannes Petrus Martinus Bernardus Vermeulen

Bas Jansen

Michael Marinus Anna Steur

An object table configured to hold an object on a holding surface, the object table including: a main body; a plurality of burls extending from the main body, end surfaces of the burls defining the holding surface; an actuator assembly; and a further actuator assembly, wherein the actuator assembly is configured to deform the main body to generate a long stroke out-of-plane deformation of the holding surface based on shape information of the object that is to be held and the further actuator assembly is configured to generate a short stroke out-of-plane deformation of the holding surface.

Growing community of inventors

Tilburg, Netherlands

Sander Jeroen Hermanussen