Trw Limited

University of Central Florida Research Foundation, Inc.

Samuel Talmadge

Steven W Fornaca

Gregory A Shreve

Henry Shields

Mark E Michaelian

Jeffrey S Hartlove

Armando Martos

Katherine E MacQueen

An EUV radiation source that employs a low energy laser pre-pulse and a high energy laser main pulse. The pre-pulse generates a weak plasma in the target area that improves laser absorption of the main laser pulse to improve EUV radiation emissions. High energy ion flux is reduced by collisions in the localized target vapor cloud generated by the pre-pulse. Also, the low energy pre-pulse arrives at the target area 20&#x2013;200 ns before the main pulse for maximum output intensity. The timing between the pre-pulse and the main pulse can be reduced below 160 ns to provide a lower intensity of the EUV radiation. In one embodiment, the pre-pulse is split from the main pulse by a suitable beam splitter having the proper beam intensity ratio, and the main pulse is delayed to arrive at the target area after the pre-pulse.

Laser-produced plasma EUV light source with pre-pulse enhancement

A system for providing the identification and tracking of motor vehicles that includes a probe device that transmits a radio frequency modulated signal to a transponder unit that is located within a vehicle registration tag of a vehicle. The transponder unit responds to the probe unit's request by transmitting its own radio frequency modulated signal containing any information requested by the probe device.

Smart license tag system

The invention relates to an extreme ultraviolet lithography system that utilizes thin film protective coatings to protect a plurality of hardware components, located near a laser-produced light source, from the erosive effects of energetic particles emitted by the laser-produced light source.

Low-sputter-yield coating for hardware near laser-produced plasma

Growing community of inventors

Agoura Hills, CA, United States of America

Samuel Talmadge