Government of the United States of America, As Represented by the Secretary of Commerce

Cornell University

Samuel Martin Stavis

Glenn Emerson Holland

J Alexander Liddle

Craig Robert Copeland

Michael Gaitan

Elizabeth Strychalski

Performing critical-dimension localization microscopy includes: subjecting a first dimensional member and a second dimensional member of a reference artifact to critical-dimension metrology, the first and second dimensional members, in combination, including a critical dimension and each independently providing optical contrast; determining a primary length of the critical dimension to be traceable to International System of Units meter; imaging in a calibrant optical field, by optical microscopy, the first dimensional member and the second dimensional member, the calibrant optical field disposed in an ocular optical field; determining, from the optical microscopy of the first dimensional member and the second dimensional member, a secondary length and a secondary length uncertainty of the critical dimension subjected to the critical-dimension metrology; and calibrating the calibrant optical field and the secondary length, to the primary length to establish traceability of the secondary length to the International System of Units meter to perform critical-dimension localization microscopy.

Apparatus for critical-dimension localization microscopy

A fluid sampler includes: a sample cell that includes: a substrate comprising: a first port; a second port in fluid communication with the first port; a viewing reservoir in fluid communication with the first port and the second port and that receives the fluid from the first port and communicates the fluid to the second port, the viewing reservoir including: a first view membrane; a second view membrane; and a pillar interposed between the first view membrane and second view membrane, the pillar separating the first view membrane from the second view membrane at a substantially constant separation distance such that a volume of the viewing reservoir is substantially constant and invariable with respect to a temperature and invariable with respect to a pressure to which the sample cell is subjected.

Vacuum compatible fluid sampler

A process for measuring a size distribution of a plurality of nucleic acid molecules, the process comprising: labeling the nucleic acid molecules with a fluorescent dye comprising a plurality of fluorescent dye molecules to form labeled nucleic acid molecules, such that a number of fluorescent dyes molecules attached to each nucleic acid molecule is reliably proportional to the number of base pairs in the nucleic acid molecule, the fluorescent dye molecules having a first florescence spectrum; producing, by the labeled nucleic acid molecules, the first florescence spectrum in response to irradiating the labeled nucleic acid molecules at the first wavelength; and detecting the first florescence spectrum to measure the size distribution of the plurality of nucleic acid molecules.

Measuring a size distribution of nucleic acid molecules in a sample

A nanofabrication process for use with a photoresist that is disposed on a substrate includes the steps of exposing the photoresist to a grayscale radiation pattern, developing the photoresist to remove a irradiated portions and form a patterned topography having a plurality of nanoscale critical dimensions, and selectively etching the photoresist and the substrate to transfer a corresponding topography having a plurality of nanoscale critical dimensions into the substrate.

Growing community of inventors

North Potomac, MD, United States of America

Samuel Martin Stavis