Other

Varian Semiconductor Equipment Associates, Inc.

General Signal Corporation

Gca Corporation

Samuel M Barsky

Roger Bradford Fish

Steven M Anella

Scott C Holden

Arthur Paul Riaf

Techniques for changing temperature of a platen are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for changing temperature of a platen comprising a platen and one or more movable thermal pads comprising one or more thermal fluid channels to carry a thermal fluid configured to affect a temperature of the platen.

Techniques for changing temperature of a platen

The flexure stage disclosed herein is useful in aligning a semiconductor wafer during microlithographic exposure to define circuit elements on the surface of the wafer. The stage is a unitary structure which permits essentially lossless small angle relative rotation of a central portion of the stage with respect to an outer, annular portion of the stage. Three pairs of slots define three links extending radially with respect to the axis of rotation and, radially outwardly from each pair of slots, a respective transverse slot in the outer portion provides radial compliance for the outer end of the respective link.

Rotational flexure stage

A combination box and box cushioning having a flat box blank member with a plurality of adhesive strips positioned on the inside thereof with a planar sheet of material adhered to said flat box blank at the position of the adhesive strips which when the box is folded and set up form a plurality of pockets between the inside of the box and the sheet material which are filled with foam material to form pockets of cushioning within the box which are prearranged as to position.

Combination box and package cushioning and method

In the reticle positioning system disclosed herein, a unitary structure is machined to form both a frame for holding a reticle and a compound linkage permitting lateral and rotational movement of the frame within its own plane under the control of three servo motors generating controllable displacements.

Growing community of inventors

Wakefield, MA, United States of America

Samuel M Barsky