Seagate Technology Incorporated

Samuel Kah Hean Wong

Joachim Walter Ahner

Stephen Keith McLaurin

Henry Luis Lott

David Marcus Tung

Florin Zavaliche

Maissarath Nassirou

An apparatus for detecting surface features is disclosed. The apparatus may include a plurality of strands configured to contain light and further configured to transmit light from a light source to a surface of an article. The apparatus may also include a detector configured to receive light reflected from the surface of the article via the plurality of strands, wherein the detector is further configured to detect features associated with the article.

Feature detection with light transmitting medium

Provided herein is an apparatus, comprising a first photon emitter configured to emit photons into an article from a circumferential edge of the article, and a photon detector array configured to detect photons scattered from features of the article.

Imaging a transparent article

Provided herein is an apparatus, including a photon emitter configured for sequentially emitting a first set of photons and a second set of photons onto a surface of an article. In addition, a photon detector array is configured to focus the first set of photons scattered from surface features of the article in a first focal plane. The photon detector array is further configured to focus the second set of photons scattered from surface features of the article in a second focal plane, wherein the first set of photons scattered is different from the second set of photons scattered. The photon detector array is further configured to provide information for distinguishing foreign surface features of the article from native surface features of the article.

Distinguishing foreign surface features from native surface features

Provided herein is an apparatus, including a photon emitter configured to emit photons onto a surface of an article, a photon detector array configured to receive photons from surface features of the article; and a processing means configured for processing photon-detector-array signals corresponding to photons scattered from the surface features and photons fluoresced from the surface features, wherein the processing means is further configured for classifying the surface features of the article.

Classification of surface features using fluoresence

Provided herein is an apparatus, including a reflective surface configured to reflect photons onto a surface of an article, a stage configured to support the article, and an assembly. The assembly is configured to radiate photons through the article to the reflective surface. The assembly is further configured to image the article with irradiance of the photons.

Apparatus for uniformly irradiating and imaging an article

Provided herein is an apparatus, including an optical characterization device; a photon detector array configured to sequentially receive a first set of photons scattered from surface features of an article and a second set of photons scattered from surface features of the article and subsequently processed by the optical characterization device; and a chemical characterization means for chemically characterizing the surface features of the article, wherein the chemical characterization means is configured for processing the first set of photons received by the photon detector array and the second set of photons received by the photon detector array.

Chemical characterization of surface features

Provided herein is an apparatus, including two photon emitters and a photon detector array. The two photon emitters are configured to emit photons onto an entire surface of an article. The photon detector array includes a number of photon detectors configured to detect photons scattered from features in the entire surface of the article, wherein the features are less than 500 nm in their largest dimension.

Surface features characterization

Provided herein is an apparatus, including a photon detector array; and a processing means configured for processing photon-detector-array signals corresponding to a first set of photons scattered from surface features of an article focused in a first focal plane and a second set of photons scattered from surface features of an article focused in a second focal plane, wherein the processing means is further configured for distinguishing foreign surface features of the article from foreign native features of the article.

Classification of surface features using fluorescence

A plating apparatus includes a vessel and a rack operable to be positioned inside the vessel. The rack includes a number of mandrels including a number of substrate mounting surfaces. The number of mandrels is non-revolving with respect to the rack. The rack further includes a number of gears coupled with the number of mandrels. A partition separates the number of gears from the number of mandrels. A diffuser is positioned below the rack. The diffuser is operable to produce a substantially uniform laminar flow of a fluid from a bottom to a top of the vessel. Thus, the laminar flow may reduce dead zones in the bath and remove defect-causing particles and gases away from the substrate.

Laminar flow plating rack

Provided herein is an apparatus, including a photon detector array configured to receive photons scattered from features in a surface of an article; and a characterization means for characterizing the features in the surface of the article, wherein the characterization means contrasts signals from the photon detector array corresponding to two sets of photons scattered from features in the surface of the article, and the two sets of photons respectively originate from photon emitters at different locations.

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Johor Bahru, Malaysia

Samuel Kah Hean Wong