Intel Corporation

Samuel Jack Beach

Han Wui Then

Walid M Hafez

Rahul Ramaswamy

Nidhi Nidhi

Johann Christian Rode

Marko Radosavljevic

Sansaptak W Dasgupta

Paul B Fischer

Xiaojun Weng

An integrated circuit includes a gate structure in contact with a portion of semiconductor material between a source region and a drain region. The gate structure includes gate dielectric and a gate electrode. The gate dielectric includes at least two hybrid stacks of dielectric material. Each hybrid stack includes a layer of low-&#x3ba; dielectric and a layer of high-&#x3ba; dielectric on the layer of low-&#x3ba; dielectric, where the layer of high-&#x3ba; dielectric has a thickness at least two times the thickness of the layer of low-&#x3ba; dielectric. In some cases, the layer of low-&#x3ba; dielectric has a thickness no greater than 1.5 nm. The layer of high-&#x3ba; dielectric may be a composite layer that includes two or more layers of compositionally-distinct materials. The gate structure can be used with any number of transistor configurations but is particularly useful with respect to group III-V transistors.

Transistor gate structure with hybrid stacks of dielectric material

Disclosed herein are IC structures, packages, and devices that include thin-film transistors (TFTs) integrated on the same substrate/die/chip as III-N devices, e.g., III-N transistors. In various aspects, TFTs integrated with III-N transistors have a channel and source/drain materials that include one or more of a crystalline material, a polycrystalline semiconductor material, or a laminate of crystalline and polycrystalline materials. In various aspects, TFTs integrated with III-N transistors are engineered to include one or more of 1) graded dopant concentrations in their source/drain regions, 2) graded dopant concentrations in their channel regions, and 3) thicker and/or composite gate dielectrics in their gate stacks.

III-N transistors integrated with thin-film transistors having graded dopant concentrations and/or composite gate dielectrics

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Aloha, OR, United States of America

Samuel Jack Beach