Sensirion Ag

Samuel Fuhrer

Moritz Lechner

Ulrich Bartsch

Zeljko Mrcarica

Ferdinando Pace

Ralph Steiner Vanha

Leo Zimmerman

Marcel Pluess

A sensor module comprises a master sensor unit for sensing a first environmental parameter, a slave sensor unit for sensing a second environmental parameter, a common substrate on which the master sensor unit and the slave sensor unit are mounted, and a digital bus interface for a communication between the master sensor unit and the slave sensor unit. The master sensor unit comprises a non-volatile memory for storing calibration data and configuration data of the master sensor unit and the slave sensor unit. The master sensor unit is embodied as a first chip, and the slave sensor unit is embodied as a second chip. Such sensor module is compact, robust and versatile.

Sensor module

A sensor chip comprises a sensing element providing a sensor signal, an on-chip memory, a configuration of a look up table of dimension N stored in the on-chip memory for assigning an output value to a combination of N input values, and a look up table engine for determining a corresponding output value in response to receiving a memory address for the look up table configuration and in response to receiving a sensor value derived from the sensor signal as one of the N input values.

Sensor chip

An integrated chemical sensor chip comprises on or integrated in a common substrate a chemically sensitive layer and a heater heating the sensitive layer. In addition, a memory is provided for the storage of a measurement routine, the measurement routine comprising instructions defining a heating process over time and instructions defining one or more measurement points in time. An I/O interface is provided for receiving a trigger for the measurement routine and for supplying a result of the measurement routine. An engine controls the heater and measures a resistance of the sensitive layer according the instructions of the measurement routine.

Integrated chemical sensor chip

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Richterswil, Switzerland

Samuel Fuhrer