Asml Holding N.v.

Massachusetts Institute of Technology

Asml Netherlands B.v.

Keystone Tower Systems, Inc.

Top Flight Technologies, Inc.

Kla Tencor Corporation

Children's Medical Center Corporation

Other

Lear Corporation

Axcelis Technologies, Inc.

Diamond-roltran, LLC

Bally Ribbon Mills

Samir A Nayfeh

Justin Matthew Verdirame

Frank Johannes Jacobus Van Boxtel

Christopher Charles Ward

Mark Josef Schuster

Peter A Delmastro

Alexander H Slocum, Jr

Eric D Smith

Rosalind K Takata

Long N Phan

Daniel Nathan Burbank

Daniel Nicholas Galburt

Johannes Onvlee

Earl William Ebert

Abdullah Alikhan

Mark F Williams

Alexander H Slocum

Pedro J Del Nido

Christopher M DiBiasio

Nikolay V Vasilyev

Keith Durand

Jonathan Brigham Hopkins

Zach Traina

Martinus Hendrikus Antonius Leenders

Thibault Simon Mathieu Laurent

Matthew Sweetland

Upendra V Ummethala

Ruud Hendrikus Martinus Johannes Bloks

Jan Steven Christiaan Westerlaken

Layton Hale

Eli M Davis

Mark Edd Williams

Jonathan D Rohrs

Luan H Duong

Andrew Wilson

William Davis Lee

Marcus Adrianus Van De Kerkhof

Johannes Hubertus Josephina Moors

H Winston Maue

Ernesto E Blanco

Santiago E Del Puerto

Ashwin Madhukar Purohit

Christopher John Mason

Joshua Randall Clyne

Eric J Krupp

Pradeep Subrahmanyan

Michael Maass

Marvin Raymond LaFontaine

Joseph Daniel Gillespie

John R Sims

Arthur Winfried Eduardus Minnaert

Victor Antonio Perez-Falcon

Julian Lemus

Michael T Howard

Joseph A Di Regolo

Joseph A DiRegolo

Enrico Zordan

Paul A DeBitetto

Richard A Moro, Jr

Chad S Klotzle

Daniel Leslie Hall

Donovan Beckel

Herbert Davis Harries, Iii

Christopher Dibiasio

Jon Hopkins

William L Lowery, Jr

M Amirul Islam

Leon Bryn

Thomas Venturino

James A Young

Windy Lynn Farnsworth

Pablo Tribin

Brandon Adam Evans

Ankur Ramesh Baheti

Soojae Jung

Anandrao Biradar

John J Polo

Teng Chao Tao

Josh Clyne

Emily C Warman

Mario Montoya

Erick Rios

Jeehan S Faiz

Amy W Cai

Justin W Raade

Jonathan D Robrs

Osamah Rifai

Sappinandana Akamphon

Mauricio Diaz

Feeding stock used to form a tapered structure into a curving device such that each point on the stock undergoes rotational motion about a peak location of the tapered structure; and the stock meets a predecessor portion of stock along one or more adjacent edges.

Tapered structure construction

Embodiments herein describe methods, devices, and systems for reducing an electric field at a clamp-reticle interface using an enhanced electrostatic clamp. In particular, the electrostatic clamp includes a clamp body, an electrode layer disposed on a top surface of the clamp body, and a plurality of burls that project from a bottom surface of the clamp body, wherein the electrode layer comprises a plurality of cutouts at predetermined locations that vertically correspond to locations of the plurality of burls at the bottom surface of the clamp body.

Lithographic apparatus and electrostatic clamp designs

An instrument port for introducing instruments into a surgical site, including a port body having a channel running therethrough from a proximal end to a distal end, an instrument sleeve in slidable contact with the channel, creating a gap therebetween, and fluid flow for removing emboli efficiently from the instrument port, wherein the fluid flow includes the gap is provided. A fluid flow system for use in an instrument port is provided. A method of removably securing an instrument sleeve to a port body by anchoring the instrument port to heart tissue, making at least one flood line in a channel, flushing out emboli, and performing surgery with the instrument port.

Instrument port for minimally invasive cardiac surgery

This invention relates to the constraint of a flexible body with low distortion and low uncertainty in its location. A class of mechanisms involving at least one pivot rocker is disclosed. These mechanisms fully constrain a body in space, but when constrained allow the flexible body to vibrate in the shape of one or more of its free mode shapes. Such a set of constraints yields a constrained system with high natural frequencies without over-constraining the body.

Exact constraint for flexible bodies

A lithographic apparatus has a support structure configured to support a patterning device, the patterning device serving to pattern a radiation beam according to a desired pattern and having a planar main surface through which the radiation beam passes; an outlet opening configured to direct a flow of a gas onto the patterning device; and an inlet opening configured to extract the gas which has exited the outlet opening, wherein the outlet opening and inlet opening are in a facing surface facing the planar main surface of the patterning device.

Lithographic apparatus

Systems and methods are disclosed that provide a support system in the Z direction for patterning devices that can function under high acceleration and deceleration with minimal effect on travel and hysteresis in the X and Y directions. A reticle clamping system includes a support device and a holding device. The holding device is configured to releasably couple a reticle to the support device. The holding device includes a plurality of burls. The reticle clamping system further includes a metallic support system coupled to the support device. The metallic support system provides a vacuum path from a vacuum channel to the holding device.

Reticle clamping device

A system includes a torque sensor; and a hybrid power system. The hybrid power sensor includes a frame; an engine mounted on the frame; and a generator, the generator including: a generator rotor mechanically coupled to a shaft of the engine; and a generator stator coupled to the frame by the torque sensor. The torque sensor is configured to measure a torque on the generator stator.

Hybrid power system characterization

An unmanned aerial vehicle includes at least one rotor motor configured to drive at least one propeller to rotate; a passenger compartment sized to contain a human or animal passenger; and a hybrid generator system configured to provide power to the at least one rotor motor and to generate lift sufficient to carry the human or animal passenger. The hybrid generator system includes a rechargeable battery configured to provide power to the at least one rotor motor; an engine configured to generate mechanical power; and a generator motor coupled to the engine and configured to generate electrical power from the mechanical power generated by the engine.

Passenger carrying unmanned aerial vehicle powered by a hybrid generator system

An unmanned aerial vehicle includes multiple rotor arms; a rotor disposed at an end of each of the multiple rotor arms; and an adjustment component configured to enable a first rotor arm to move relative to a second rotor arm.

Unmanned aerial vehicles with multiple configurations

An aerial vehicle includes a hybrid power generation system comprising an engine; a generator mechanically coupled to the engine; and a propulsion system comprising an electric motor electrically coupled to the generator and a rotational mechanism coupled to the electric motor.

Power generation and distribution for vehicle propulsion

A patterning device support for controlling a temperature of a patterning device can include a movable component. The movable component can include a gas inlet for supplying a gas flow across a surface of the patterning device and a gas outlet for extracting the gas flow. The patterning device support can also include a gas flow generator coupled to a duct, for recirculating the gas flow from the gas outlet to the gas inlet.

Patterning device support, lithographic apparatus, and method of controlling patterning device temperature

An unmanned aerial vehicle includes at least one rotor motor configured to drive at least one propeller to rotate. The unmanned aerial vehicle includes a data center including a processor; a data storage component; and a wireless communications component. The unmanned aerial vehicle includes a hybrid generator system configured to provide power to the at least one rotor motor and to the data center, the hybrid generator system including a rechargeable battery configured to provide power to the at least one rotor motor; an engine configured to generate mechanical power; and a generator motor coupled to the engine and configured to generate electrical power from the mechanical power generated by the engine. The data center may include an intelligent data management module configured to control power distribution and execution of mission tasks in response to available power generation and mission task priorities.

Data center powered by a hybrid generator system

Growing community of inventors

Somerville, MA, United States of America

Samir A Nayfeh