Disco Corporation

Saki Kimura

Hirokazu Matsumoto

A laser processing method includes a supporting step of attaching an adhesive tape to an annular frame having an opening for accommodating the plate-shaped workpiece and attaching the plate-shaped workpiece to the adhesive tape. The adhesive tape is composed of a base film, an adhesive layer formed on one side of the base film, and a functional layer formed on the other side of the base film. The functional layer includes fine particles of metal oxide, emulsion particles of thermoplastic resin as a binder, and a dispersing medium. The laser processing method further includes a laser processed groove forming step of applying a laser beam from a laser beam applying unit to the plate-shaped workpiece held on the chuck table and relatively feeding the chuck table and the laser beam applying unit by operating a feeding unit, thereby forming the laser processed groove on the plate-shaped workpiece.

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Tokyo, Japan

Saki Kimura