Semiconductor Energy Laboratory Co., Ltd.

Saki Eguchi

Hiroki Adachi

Junpei Yanaka

Akihiro Chida

Kohei Yokoyama

Seiji Yasumoto

Kayo Kumakura

Tatsuya Sakuishi

Yutaka Uchida

Yoshiharu Hirakata

Masakatsu Ohno

Koichi Takeshima

A flexible device is provided. The hardness of a bonding layer of the flexible device is set to be higher than Shore D of 70, or preferably higher than or equal to Shore D of 80. The coefficient of expansion of a flexible substrate of the flexible device is set to be less than 58 ppm/&#xb0; C., or preferably less than or equal to 30 ppm/&#xb0; C.

Peeling method using separating peeling layer and layer to be peeled

Light-emitting device with flexible substrates

A yield in a separation process is improved. A separation apparatus which enables easy separation in a large-area substrate is provided. The separation apparatus has a function of dividing a process member into a first member and a second member and includes a support body supply unit, a support body hold unit, a transfer mechanism, a direction changing mechanism, and a structure body. The structure body bonds a support body to a surface of the first member. When at least part of the process member is located between the direction changing mechanism and the structure body or the pressure applying mechanism, the shortest distance between the direction changing mechanism and a first plane including the surface of the first member is longer than the shortest distance between the first plane and the structure body or the pressure applying mechanism.

Separation apparatus

A peeling apparatus including a support body supply unit, a support body hold unit, a transfer mechanism, and a first structure body. The first structure body has a convex surface. The support body supply unit has a function of unwinding a first support body and includes one of a pair of tension applying mechanisms. The support body hold unit includes the other of the pair of tension applying mechanisms. The pair of tension applying mechanisms applies tension to the first support body. The transfer mechanism has a function of transferring a process member. The first structure body has a function of bending back the first support body along the convex surface. The first structure body has a function of dividing the process member into a first member and a second member. An angle at which the first structure body bends back the first support body is an obtuse angle.

Peeling apparatus

Light-emitting device and peeling method

Growing community of inventors

Tochigi, Japan

Saki Eguchi