Air Products and Chemicals, Inc.

Versum Materials US, LLC

Sai-Hong Andrew Lo

Howard P Withers, Jr

James Joseph Hart

Rajiv Krishan Agarwal

Joseph T Sluzevich

Manchao Xiao

Ronald Martin Pearlstein

Wayne Thomas McDermott

Reinaldo Mario Machado

Agnes Derecskei-Kovacs

Krishnakumar Jambunathan

Edward Jay Cialkowski

Philip E Behm

Jr Howard Paul Withers

The method described herein provides a method for preparing trisilylamine. In one aspect, the method comprises: providing a reaction mixture of trisilylamine and monochlorosilane into a reactor wherein the reaction mixture is at a temperature and pressure sufficient to provide trisilylamine in a liquid phase wherein the reaction mixture is substantially free of an added solvent; contacting the reaction mixture with ammonia to provide a crude mixture comprising trisilylamine and an ammonium chloride solid wherein monochlorosilane is in stoichiometric excess in relation to ammonia; purifiying the crude mixture to provide trisilylamine wherein the trisilyamine is produced at purity level of 90% or greater; and optionally removing the ammonium chloride solid from the reactor.

Process for making trisilylamine

An electrolytic cell and system used for making nitrogen trifluoride consisting of a computer and an electrolytic cell having a body, an electrolyte, at least one anode chamber that produces an anode product gas, at least one cathode chamber, and one or more fluorine adjustment means to maintain fluorine or hydrogen in the anode product gas within a target amount by adjusting the concentration of fluorine in said anode product gas, and the process that controls the system.

Electrolytic apparatus, system and method for the safe production of nitrogen trifluoride

The present invention is a container and a processing for passivating the internal surface of the container to store monochlorosilane in a stable manner without degradation of the monochlorosilane. Various container surface modifications have been identified to reduce surface reactions to acceptable levels. Some of the described surface modifications result in significant reduction in monochlorosilane instability.

Cylinder surface treated container for monochlorosilane

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Allentown, PA, United States of America

Sai-Hong Andrew Lo