Hitachi, Ltd.

Hitachi-science Systems, Ltd.

Sadao Terakado

Hideo Todokoro

Satoru Yamada

Tokuo Kure

Tadashi Otaka

Katsuhiro Kuroda

Fumio Mizuno

Ken Ninomiya

Kenji Takamoto

Hiroyuki Kobayashi

Tomoyuki Miyata

Atsushi Katayama

Peter Hohmann

Morioki Kubozoe

Daiji Tsuboi

Hisashi Sato

An electron beam which can transmit through part of a specimen and can reach a portion not exposing to the electron beam is irradiated and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A cubic model is assumed, the cubic model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified cubic model.

Scanning electron microscope and method for dimension measuring by using

Electron microscope

An electron beam, which can transmit through part of a specimen and can reach a portion that is not exposed to the electron beam, is irradiated, and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A three-dimensional model is assumed, the three-dimensional model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified three-dimensional model.

In a transmission electron microscope, an electron beam from an electron gun is irradiated on a specimen by an illuminating lens system and a transmission image of the specimen is formed on a photographic film by an image forming lens system. The transmission image is picked up by a TV camera and displayed on a television display screen and a view field range of recording image with the photographic film is manifested on the display screen.

Transmission electron microscope

Growing community of inventors

Katsuta, Japan

Sadao Terakado