Hitachi Via Mechanics Ltd.

Sadao Mori

Hiroshi Aoyama

Hiroyuki Sugawara

A laser machining apparatus in which three or more beam splits are made incident on one machining lens so that high speed machining can be achieved, and the machining quality (shapes, dimensions, accuracy and straightness of machined holes) is excellent. The optical paths of beams A and B having the same polarization direction are aligned almost in one and the same direction by a total reflection/transmission type beam combining meansusing a difference in incident angle. After that, the optical paths of the beams A and B and the optical path of a beam C different in polarization direction therefrom are aligned almost in one and the same direction by a polarizing type beam combining meansThen, the beams A, B and C are made incident on a machining lens

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Odawara, Japan

Sadao Mori