Hitachi, Ltd.

Hitachi Tokyo Electronics Co., Ltd.

Sadao Matsuoka

Yasuhiro Mitsui

Takashi Irie

Toshiki P Tanaka

Michimasa Funabashi

Mitsuo Tanaka

Makoto Onishi

Katsuhiko Itoh

Takeshi Tajima

Keiji Hasumi

Katsuyuki Nagano

Kazuo Nakano

Kazuaki Mizokami

An atmospheric pressure, elevated temperature gas desorption apparatus which enables quanitiative analysis of impurities absorbed in or on the surface of a solid sample (semiconductor wafer, optical disc, etc.) is disclosed. The atmospheric pressure, elevated temperature gas desorption apparatus for desorbing impurities absorbed in or on the surface of a plate-like solid sample 18 into a carrier gas 19 in a chamber 6 under an atmospheric pressure while increasing the temperature of the solid sample 18 includes a desorption room 7A provided in the chamber 6 and connected through to a first gas supply system 1 for supplying the carrier gas 19, for desorbing impurities absorbed in or on the surface of the solid sample 18 into the carrier gas 19. A sample support room 7B is provided in the chamber 6 and is separated from the desorption room 7A by a partition member 6A. The solid sample 18 is in close contact with the partition member 6A. A heater 8 for heating the solid sample 18 is in close contact with the partition member 6A. A reserve room 9 is connected to the sample support room 7B and to a second gas supply system 13 for supplying a purge gas.

Atmospheric pressure, elevated temperature gas desorption apparatus

In an optical fiber connector, the pair of optical fibers to be connected together are placed end-to-end in a linear groove which has been formed on a lateral surface of a central cylinder. They are held fixed by a holding member which is fitted in the groove and is moved towards the optical fibers according to the rotation of a hollow cylinder which externally touches the central cylinder, whereby the optical fibers can be connected with a precise alignment and accordingly with a low optical power loss.

Optical connector

Growing community of inventors

Kanagawa, Japan

Sadao Matsuoka