Organo Corporation

Japan Atomic Energy Agency

Other

Sadamitsu Tanzawa

Tetsuya Abe

Takashi Futatsuki

Seiji Hiroki

Yoshinori Tajima

Yoshinori Ono

Takayuki Masuda

Toshihisa Hatano

There is provided a gas separation apparatus for separating a specified gas from a gas to be treated containing a plurality of gases. The gas separation apparatus includes a plurality of serially-connected separation units that separate the specified gas from other gases by using a column, and a suction unit that controls an inside of the column to a reduced pressure. At least two of the plurality of separation units differ from each other in at least one separation condition.

Apparatus and method for separating gas

An apparatus and a method for separating a specified gas from a gas to be treated containing the specified gas comprising at least one ingredient, which comprises allowing the gas to be treated to flow through a column without the use of another gas for transferring the gas to be treated, while keeping the inside of the column packed with a packing material at a reduced pressure. The above apparatus and method can be suitably used for separating a specified gas having a high purity at a low cost.

A unit for separating an exhaust gas containing PFC gases including CFand CFgenerated in a production process, wherein the exhaust gas is concentrated in a concentration device, and then separated chromatographically in a chromatographic separation device using nitrogen as a carrier gas. The chromatographic separation device is packed with molecular sieve 13X or F-9 or the like. The unit is capable of effectively separating CFand CF.

Unit for separating gas

A discharge gas containing PFC gas including CF and NF generated from a manufacturing process ( ) is adsorbed at an adsorbing device ( ) and then desorbed using nitrogen as a purge gas. A desorbed gas with CF and NF concentrated can be obtained in this manner. The desorbed gas is then supplied to a chromatographic separator ( ) for chromatographic separation with nitrogen as a carrier gas. In this manner, CF and NF within the PFC gas can be separated. In particular, because the gas is once concentrated at the adsorbing device ( ), chromatographic separation of the gas constituents can be efficiently performed. By independently concentrating CF and NF obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process ( ).

Gas separation apparatus

A discharge gas containing PFC gas including CF and NF generated from a manufacturing process ( ) is concentrated at a concentrator ( ) and then chromatographically separated at a chromatographic separator ( ) with nitrogen as a carrier gas. In this manner, CF and NF within the PFC gas can be separated. In particular, because the gas is once concentrated at the concentrator ( ), chromatographic separation can be efficiently achieved. By independently concentrating CF and NF obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process ( ).

A raw gas containing a gas component A with low affinity with an adsorbent and a gas component C with high affinity with the adsorbent are sequentially supplied to at least three adsorption columns, while a desorption gas containing a gas component D which differs from the gas components A and C is supplied to each of the adsorption columns other than the one to which the raw gas is being supplied. When the raw gas is supplied to the adsorption columns, the gas component A having lower affinity with the adsorbent exits the adsorption columns earlier than the gas component C having higher affinity. The gas components A and C can thus be separated from each other. When a gas including an enriched gas component A is discharged from the outlet of each adsorption column, the full amount is extracted out of the system. When a gas including an enriched gas component C is discharged from the outlet of each adsorption column, the full amount is extracted out of the system. When the gas mixture containing the gas components A and C is discharged from the exit of each adsorption column, all the discharged gas is fed back to the inlet of the adsorption column to which the raw gas is being supplied. It is possible to efficiently and sequentially separate the gas components A and C with this simple structure.

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Ibaraki-ken, Japan

Sadamitsu Tanzawa