Tdk Corporation

Sachio Tsuboike

Susumu Haratani

Takashi Kikukawa

Sumiko Kitagawa

Haruki Yuga

What provided is a biosensor including: a substrate having a surface with first and second regions adjacent each other; a magnetoresistance effect element disposed on the first region; a soft magnetic thin film on the second region; a protective film disposed on both the first region and the second region, covering a surface of the soft magnetic thin film, and disposed on the top part of the second region and contains an affinity substance recognizing the biomolecule on the outer surface of the second region exclusively; and an MR cover film disposed on at least the top part of the first region, disposed on the protective film above the magnetoresistance effect element, and being free of the affinity substance, wherein the soft magnetic thin film transmits an in-plane component of a stray magnetic field of magnetic beads to the magnetoresistance effect element.

Biosensor and biochip

A chemical sensor that enables high detection accuracy. A chemical sensor includes a substrate, a magnetoresistance-effect element disposed over the substrate, a first film disposed over the magnetoresistance-effect element, and a second film disposed in a region in the vicinity of the magnetoresistance-effect element or over a region in the vicinity of the magnetoresistance-effect element, wherein the second film has higher solubility in a specific liquid than the first film.

Chemical sensor

To provide a chemical sensor that enables high detection accuracy. A chemical sensor includes a substrate, two or more magnetoresistance-effect elements disposed side by side in a substrate in-plane direction over the substrate, a first film disposed over a region between the magnetoresistance-effect elements adjacent to each other, and a second film disposed over the magnetoresistance-effect elements, wherein the second film has higher solubility in a specific liquid than the first film.

A chemical sensor that enables high detection accuracy that includes a soft-magnetic-material film, a magnetoresistance-effect element, a first film disposed over the soft-magnetic-material film, and a second film disposed over the magnetoresistance-effect element, wherein, when viewed from a direction perpendicular to the film surface of the soft-magnetic-material film, the soft-magnetic-material film is disposed at least partially so as not to overlap the magnetoresistance-effect element; when viewed from the direction perpendicular to the film surface of the soft-magnetic-material film, the magnetoresistance-effect element is disposed at least partially so as not to overlap the soft-magnetic-material film; and the second film has higher solubility in a specific liquid than the first film.

A sensor includes: a substrate; a first magnetoresistance element and a second magnetoresistance element, each of which is a magnetoresistance element whose resistance value measured changes depending on a direction of an input magnetic field; and a soft magnetic thin film disposed adjacent to the first and second magnetoresistance elements wherein one of the first and second magnetoresistance elements is positioned on one of end sides of the soft magnetic thin film and other of the first and second magnetoresistance elements is positioned on other of the end sides of the soft magnetic thin film in a plan view in a direction perpendicular to a film surface of the soft magnetic thin film.

Growing community of inventors

Tokyo, Japan

Sachio Tsuboike