Other

Sumitomo Precision Products Co., Ltd.

Matsushita Electric Works, Ltd.

Agency of Industrial Science and Technology

Kawasumi Laboratories. Inc.

Sachiko Okazaki

Masuhiro Kogoma

Masahiro Hirakawa

Yasushi Sawada

Keiichi Yamazaki

Michio Abe

Yoshitami Inoue

Hiroaki Nomiyama

Kazuo Kasai

Makoto Kodama

Tohru Maruyama

A plasma processing apparatus for performing plasma processing of an article, comprising: a central electrode; a tubular outer electrode which is provided so as to surround the central electrode; a tubular reaction pipe which is disposed between the central electrode and the outer electrode so as to electrically insulate the central electrode and the outer electrode from each other; a gas supply device for supplying a plasma producing gas to a discharge space defined between the central electrode and the outer electrode in the reaction pipe; an AC power source for applying an AC voltage between the central electrode and the outer electrode; wherein not only the plasma producing gas is supplied to the discharge space by the gas supply device but the AC voltage is applied between the central electrode and the outer electrode by the AC power source so as to generate a glow discharge in the discharge space under atmospheric pressure such that a plasma jet is blown to the article from a blow-off outlet of the reaction pipe; and a cooling device for cooling the central electrode and the outer electrode.

Plasma processing apparatus and method

A plastic tube extruded from an extruder is conveyed through a plasma treatment apparatus. The plasma treatment apparatus is equipped with a tubular electrode body having a high-voltage side electrode and a grounded-side electrode disposed on a tubular insulator and a high frequency electric power source connected to the electrodes. When the plastic tube is conveyed through the electrode body with one end of the tube open to the atmosphere, a mixture of a glow discharge-stabilizing gas and a treating gas is fed into the other end of the tube and an alternating-current high-voltage is applied to generate a plasma region at a pressure near to atmospheric pressure in which the tube is treated with a glow discharge plasma. This method allows an interior and/or exterior surface of a plastic tube designed to convey a medical fluid to be continuously treated by a glow discharge plasma at atmospheric pressure to form an anti-thrombotic and blood-compatible film on the surface treated. The resulting surface-treated medical material can be produced at a comparatively low cost and maintains its original bulk material properties.

Method for producing medical materials

Clad fine wire electrode-type activated species-generating apparatus

This invention concerns a SiO.sub.2, SiN.sub.x protection film formed by a CVD or PVD gas phase glowing method capable of preventing melting of the matrix ingredients at the surface of a dielectric material in electric discharge of an ozone generator and it relates to a dielectric material used for an ozone generator capable of overcoming the problems for the abrasion of electrode and dielectric material or melting of ions or molecules of during electric discharge, as well as a method of forming a protection film therefor based on the finding that an SiO.sub.2 film or SiN.sub.x film can be formed easily on a surface of a predetermined electric material or, further, on a surface of electrode by processing a specific reaction gas, for example, comprising a crude gas such as SiH.sub.4, SiCl.sub.4, N.sub.2, NH.sub.3 or TEOS or further incorporated with an inert gas or like by means of an atmospheric CVD process such as CVD or heat CVD and, in particular, on the finding that the protection film can be disposed directly to the surface of the dielectric material and the electrode in an ozone generator after the completion of assembling.

Dielectric material used for an ozone generator and a method of forming

Growing community of inventors

Tokyo, Japan

Sachiko Okazaki