Hitachi, Ltd.

Computer Basic Technology Research Corp.

Saburo Suzuki

Eisei Togawa

Yoshiki Hagiwara

Shunichiro Kuwatsuka

Hirotaka Imayama

Moriaki Fuyama

Yasuo Hira

Kazuo Nate

Masayasu Fujisawa

Hiroshi Ishizaki

Hideki Sonobe

Atsuko Ohkawa

Tamaki Toba

Shinji Narishige

Tetsuo Kobayashi

Eiji Ashida

Harunobu Saito

Masayuki Takagi

Hiroshi Fukui

Hiroshi Ikeda

Kazuo Shiiki

Isamu Yuito

Takao Imagawa

Masaki Ohura

Takashi Kawabe

Makoto Morijiri

Susumu Soeya

Eijin Moriwaki

Shigeru Tadokoro

Sadanori Nagaike

Yoshihiro Hamakawa

Tetsuya Okai

Akira Onuma

Hideki Yamazaki

Tadashi Imanaka

Osamu Hirai

Eizi Ashida

Yasuo Wakaki

Kenji Sugimoto

Eimi Ando

Keiko Shiokawa

A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55-85&deg;. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15-60&deg; and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g., CH,FCF,) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF,or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic bead and magnetic disc.

Thin film magnetic head having non-linear tapered rails

A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55-85.degree.. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15-60.degree. and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g., CH.sub.2 FCF.sub.3) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF.sub.6 or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic head and magnetic disc.

Thin film magnetic head having non-linear rails

A thin film magnetic head comprising a sintered ceramic substrate, an underlayer, a bottom magnetic core film, a magnetic gap film, an insulating film containing coil windings, a top magnetic core film, and a protective layer. The substrate and other films and layers form an air bearing surface. The under layer, the magnetic gap film and the protective layer comprise Al.sub.2 O.sub.3, and the bottom and the top magnetic core films comprise Ni--Fe alloy. This structure gives substantially the same etching rate, when the air bearing surface is polished using a working fluid of pH 6-8, for any of the substrate, the films comprising Al.sub.2 O.sub.3 and metal oxide described above, and the films of Ni--Fe alloy. Thus, steps (pole top recessions) on the air bearing surface can be made as small as 0.015 .mu.m or less. Accordingly, the magnetic head can be held in a stable attitude, thus obtaining good recording characteristics.

Thin film magnetic head and production method thereof and magnetic disk

A magnetic disc apparatus is disclosed, in which a magneto-resistance effect film converts a magnetic signal into an electrical signal by use of the magneto-resistance effect, a pair of electrodes supplies a signal detection current to the magneto-resistance effect film, and a magnetic domain control layer controls the magnetic domain of the magneto-resistance effect film. The magneto-resistance effect film, the electrodes and the magnetic domain control layer constitute a magnetic head of magneto-resistance effect type. An isolation film is formed in a magneto-sensitive portion of the magneto-resistance effect film between the magneto-resistance effect film and the magnetic domain control layer to break the magnetic coupling between the magneto-resistance effect film and the magnetic domain control layer.

Magnetic disc apparatus

A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55.degree.-85.degree.. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15.degree.-60.degree. and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g. CH.sub.2 FCF.sub.3) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF.sub.6 or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic head and magnetic disc.

Thin film magnetic head, process for production thereof

A thin film magnetic head including conductor coils, a plurality of insulating layers to interpose and insulate the conductor coils and a magnetic gap layer between upper and lower magnetic cores, in which another insulating layer is provided on a stepped region formed by end faces of the plurality of insulating layers.

Thin film magnetic head and manufacturing method therefor

A method of producing a thin film magnetic head by successively depositing on a substrate a first magnetic material, a gap material, an electrically conductive material consisting of a coil, an insulating film, a second magnetic material and a protecting film, wherein the improvement comprises a step for forming a recessed portion in the insulating film at a portion corresponding to a gap portion on the air bearing surface side, the bottom surface of said recessed portion serving as an exposed portion on the upper surface of the gap material and the side surfaces of said recessed portion being tapered, a step for forming a recessed portion in the gap material by etching using the insulating film with the recessed portion as a mask and making the thickness thereof equal to the gap length, and a step for depositing a second magnetic material on the whole surface, so that the recessed portion formed in the gap material will have a rectangular shape with its one side being equal to a gap depth and its another side being equal to a track width. Unlike the conventional art, no thick photoresist film is used in a step for determining the gap depth and the track width, making it possible to obtain a thin film magnetic head having a small gap depth and a narrow track width maintaining high precision.

Method of producing a thin film magnetic head

A thin film magnetic head having two conductor layers provided within a magnetic circuit constituted by a first and a second magnetic member. The magnetic circuit has, at the side to which a recording medium is opposed, a portion where the first and second magnetic members are opposed to each other over a length substantially equal to a gap depth, intervening a non-magnetic gap member therebetween, and a portion ahead thereof where they are connected with each other. The edge of the gap member constitutes an aperture of the magnetic circuit. The thin film magnetic head arranged as above permits a high density recording without reducing its production yield.

Thin film magnetic head and method of manufacture

Disclosed is a thin film magnetic head having a structure wherein the main portion of a coil consists of a copper or copper alloy layer and its upper surface is covered with a thin film mask consisting of titanium, titanium oxide, chromium and/or chromium oxide. The magnetic head of the invention can prevent the occurrence of projecting etching residues at the upper edge portion of the coil and can easily increase the cross-sectional area and the winding density of the coil. Furthermore, when the thin film mask consists of titanium and/or titanium oxide, a titanium diffusion prevention film consisting of chromium, for example, is interposed between the thin film mask and the copper or copper alloy, so that the resistance change of the coil scarcely takes place owing to heat treatment in a production process after the formation of the coil and the head reliability can be further improved.

Thin film magnetic head having an improved coil

A thin-film magnetic head having a magnetic core of double step structure and a method of fabricating it. A first magnetic core is formed on a substrate, which has a predetermined thickness at a pole chip region thereof and a thickness larger than the predetermined thickness at a back region thereof; a magnetic gap is formed thereon, a conductor coil is formed on the magnetic gap, which is encircled by an inter-layer, insulating film; a first magnetic film is formed thereon, which constitutes one layer of a second magnetic core and is connected with the first magnetic core at the back region; and a second magnetic film is formed thereon through an inorganic insulating film, which constitutes another layer of the second magnetic core and is removed at the pole chip region. When the second magnetic film is removed, the inorganic insulating film serves to protect the first magnetic film, and hence the thickness of the first magnetic film is maintained unvaried. Thus, there is obtained the thin-film magnetic head having a magnetic film which is of a predetermined thickness at the pole chip region and a thickness larger than the predetermined thickness at the back region. This structure enhances the conversion efficiency of the head as well as boosts the resolution for reproduction and relaxes the magnetization saturation for recording.

Thin-film magnetic head and method for fabricating the same

Growing community of inventors

Minami-ashigara, Japan

Saburo Suzuki