Endress + Hauser Gmbh + Co. Kg

Sabine Stolle

Frank Hegner

Elke Maria Schmidt

Andreas Rossberg

Ulfert Drewes

Christel Kretschmar

Melanie Hentsche

A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode, which faces the surface of the platform, the surface of the platform has at least a second electrode, which faces that of the measuring membrane. The capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.

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Dresden, Germany

Sabine Stolle