Korea Institute of Science and Technology

S Joon Kwon

Il Ki Han

Young Min Jhon

Young-Hwan Kim

Hyungduk Ko

Chun Keun Kim

Gumin Kang

Joonhyun Kang

The present disclosure relates to a photoacoustic gas sensor for detecting the presence or absence of gas using the interaction of a laser beam and gas molecules. The integrated photoacoustic gas sensor according to an embodiment includes a light output unit; a lens unit configured to concentrate a laser beam output from the light output unit; and a photoacoustic sensing unit having a quartz tuning fork aligned on the lens unit and configured to convert a vibration, generated when the laser beam passing through the lens unit interacts with gas molecules, into an electric signal.

Integrated photoacoustic gas sensor and method for manufacturing the same

A method for surface planarization of an object using a light source of a specific wavelength according to an embodiment includes: providing an object in a main chamber; injecting an etching gas into the main chamber; inputting the light source of a specific wavelength onto a surface of the object; and controlling a temperature of the object. According to the method, it is possible to minimize the side effects such as scratches or contamination of the sample that occur in a conventional chemical-mechanical planarization process. In addition, it is possible to allow precise planarization in nanometers (nm) and simultaneously perform planarization to a side surface of a device as well as a large-sized surface, thereby reducing cost and time required for the planarization process. Moreover, since the surface roughness and the electrical conductivity are improved, it is possible to increase the efficiency and output of the LED device.

Method and apparatus for surface planarization of object using light source of specific wavelength and reactive gas

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Seoul, South Korea

S Joon Kwon