Rudolph Technologies Germany Gmbh

Masterwork Group Co., Ltd.

Sönke Siebert

Markus Möhringer

Christian Görbing

Holger Wenz

Dietrich Drews

A holding/turning device for touch-sensitive flat objects, in particular wafers, with a distance positioning device which is arranged for holding the object perpendicular to the object plane at a defined distance, a lateral positioning device, arranged for positioning the object in the object plane and for rotating together with the object about a rotational axis perpendicular to the object plane, and with a rotational drive, coupled with the lateral positioning device, providing a driving force for rotating the object about the rotational axis, wherein the driving force can be applied to the object by the lateral positioning device. The distance positioning device is adapted for holding the object without involving contact, and is decoupled from the rotational drive in such a way that the distance positioning device does not rotate together with the object.

Growing community of inventors

Heidelberg, Germany

Sönke Siebert