Helmut Fischer Gmbh Institut Fur Elektronik Und Messtechnik

Agilent Technologies, Inc.

Rüdiger Mästle

Lars-Christian Anklamm

Andreas Godorr

An apparatus includes at least one Terahertz (THz) device that transmits or receives THz radiation or transmits and receives THz radiation. The apparatus also provides a flow of protective gas in at least one portion of the beam path of the THz radiation.

Apparatus comprising at least one THz device and method of operating such apparatus

A measuring device comprises a Terahertz, THz, transmitter configured to emit a THz signal to an object to be measured and a THz receiver configured to receive a reflected portion of said THz signal that has been reflected by said object. The said THz transmitter and said THz receiver are arranged in a measuring head of said measuring device. The measuring device may vary a distance between said measuring head and said object to be measured, emit, by means of said THz transmitter, said THz signal to said object to be measured, receive said reflected portion of said THz signal, and determine a first parameter characterizing a detected signal proportional and/or related to said received reflected portion of said THz signal.

Measuring device and method of operating a measuring device

An apparatus determines a layer thickness of a plurality of layers arranged on a body. The apparatus includes a THz transmitter configured to emit a THz signal to said plurality of layers and a THz receiver configured to receive a reflected portion of said THz signal that has been reflected by at least one layer of said plurality of layers. The apparatus is configured to determine the layer thickness of at least one of said plurality of layers based on said reflected portion of said THz signal. The apparatus further includes a distance measuring device for determining at least one parameter characterizing a distance between said apparatus and said body, wherein said distance measuring device may include at least one optical triangulation sensor.

Apparatus for determining a layer thickness and method of operating such apparatus

The present invention relates to an apparatus and to a method of optical spectrum analysis of an optical spectrum of a light beam (), comprising the steps of selecting a certain part of the optical spectrum of the light beam () to provide a filtered light beam (), detecting the filtered light beam () to provide an electrical signal corresponding to a power amplitude (O(&#x3bb;)) of the filtered light beam (), detecting the filtered light beam () to provide an electrical signal corresponding to a wavelength of the filtered light beam (), and providing the power amplitude as a function of the wavelength of the filtered light beam ().

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Böblingen, Germany

Rüdiger Mästle