Matsushita Electric Industrial Co., Ltd.

Ryutarou Akutagawa

Hidenobu Shintaku

Isamu Inoue

Hirozo Takegawa

Kayoko Kodama

Shigeo Suzuki

A vacuum evaporation apparatus has a melting pot containing evaporating material therein and a movable partition. A surface of the evaporating material is separated into a supplying surface (whereinto a Cr-Co material rod of replenishing material is supplied) and an evaporating surface (whereonto an electron beam is irradiated) by the partition only during deposition of evaporating material onto a substrate. After finish of the deposition, the partition is lifted and is apart from the surface.

Vacuum evaporation apparatus and method for making vacuum evaporated

A method for supplying a vacuum evaporation material provides a first vacuum evaporation material accommodated in a crucible and heated by electron beams so as to be fused. When a thin film is formed by adhering vapor generated form the first material to a substrate, a second long supply vacuum evaporation material is fed in a positive direction, the second material moving from above a liquid surface of the first material toward the first material which has fused in the crucible. An average feed speed of the second material is maintained by alternately switching a feed direction between the positive direction and the negative direction, in which the second material moves backward. An apparatus for supplying the vacuum evaporation material in which the first material is supplied to the crucible by alternately switching the feed direction between the positive and the negative directions, includes an operating circuit for performing the following calculation based on an instruction of an average supply speed (V.sub.AV) for feeding the second material:

Growing community of inventors

Neyagawa, Japan

Ryutarou Akutagawa