Fujikin Inc.

Koganei Corporation

Kabushiki Kaisha Fujikin

Fujikin Irc.

Ryutaro Tanno

Tsutomu Shinohara

Yuya Suzuki

Akihiro Harada

Masahiko Ochiishi

Katsunori Komehana

Hidenori Kiso

Tomohiro Nakata

Takahiro Matsuda

Kenji Aikawa

Izuru Shikata

Hisatoshi Akamoto

Tomoki Nakada

Yuto Kawauchi

Daihi Tsuchiguchi

Kengo Tsujino

Nobukazu Ikeda

Kouji Nishino

Michio Yamaji

Ryousuke Dohi

Akira Watanabe

Katsuyuki Sugita

Toshihide Yoshida

Nobuo Nakamura

Koji Kawada

Masahiko Takimoto

Kenta Kondo

Yoshino Fujii

Takahiro Mastuda

Yoshiaki Watanabe

Takahiro Kawano

Hiroto Shibata

Koudai Okazaki

A valve control apparatus including: an operating time measurement unit that measures an operating time of a valve based on an operation pressure of the valve and whether the valve is open or closed; and a command control unit that receives an opening command directed to the valve and transmitted from a control apparatus, and transmits the opening command to the valve in a delayed manner based on the operating time and a predetermined reference time.

Valve control apparatus, valve control system, valve control method, and valve control program

An operation information collection system for a fluid control device configured as an operation information collection module includes a detected value acquisition unit acquiring a detected value of a state change or a device operation able to detect opening/closing operations from the fluid control device, a calculation processing unit calculating a rate of change of detected values separated by a predetermined time based on the detected value, and an operation information registration unit registering the rate of change of the detected values separated by the predetermined time to an operation information storage unit as an operation information of the fluid control device.

Operation information collection system for fluid control device, fluid control device, operation information collection method for fluid control device, and computer executable program

Provided is a fluid control device that is compact and that enables data regarding an internal operation of the device to be acquired. A fluid control device V is disposed in a flow path of a fluid and enables data regarding an internal operation to be acquired, the fluid control device including a sensor hoodto which one or more sensors Mfor detecting an operation in the fluid control device are attached; a valve bodyconnected to the sensor hood; a diaphragmheld below the sensor hood, inside the valve body; a cover portionthat covers the outer periphery of the sensor hood; and a circuit boardthat is electrically connected to the sensor(s) and for which a thickness direction of the circuit board and a flow path direction are arranged in the same direction on the inside of the cover portion.

Fluid control device

To enable accurate and simple diagnosis of an operation abnormality of a valve. A valve Vcapable of detecting an operation abnormality has a magnet Mthat is attached in the vicinity of a pressing adapterof a stemthat slides according to an opening/closing operation of the valve V, and a magnetic sensor Mthat is attached to a surface acing the stem, inside the pressing adapterthat presses a peripheral edge of a diaphragm, and detects a change in a distance between the magnet Mand the magnetic sensor M. Further, an abnormality determination mechanism compares the change in the distance between the magnet Mand the magnetic sensor Mat the time of abnormality diagnosis detected by the magnetic sensor Mand a previously measured change in the distance between the magnet M and the magnetic sensor Mat the time of normality, and determines whether or not there is an abnormality.

Valve, abnormality diagnosis method of valve

A valve which can accurately detect an operation of the valve is provided. The valve includes a valve body defining a fluid flow passage, a valve disk operating to be able to open and close the fluid flow passage, an actuator driving the valve disk by supplying or interrupting a working fluid, a stem transmitting a driving force of the actuator to the valve disk, a detection means detecting an opening and closing operation of the valve disk, and an elastic member fixing a ring-shaped magnetic body inserted through an end of the stem to the stem. The detection means includes the magnetic body fixed by the elastic member, and a magnetic sensor detecting a change in a magnetic field of the magnetic body.

Valve and fluid control device with a magnetic indicator

A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. Further, a fluid leak abnormality is identified as a change accompanying an operation of the fluid control device and the fluid leaks is detected with high accuracy. A fluid control device, having a flow path and a closed space isolated from the flow path by a diaphragm and capable of detecting an abnormality, includes a pressure sensor detecting a pressure inside of the closed space, a processing module executing a predetermined information process, and an operation detecting mechanism detecting an operation of the fluid control device. The processing module executes a discriminating process discriminating abnormality of the fluid control device by comparing a detected value detected by the pressure sensor with a predetermined threshold value, and a correcting process correcting the predetermined threshold value in accordance with the operation of the fluid control device.

Fluid control device, abnormality detection method of fluid control device, abnormality detection device, and abnormality detection system

An entire fluid supply line or an entire fluid controller constituted by a plurality of fluid control devices is precisely monitored. A fluid controller G accumulating and having a plurality of fluid control devices A. The fluid control devices A include an operation information acquisition mechanism acquiring an operation information in the fluid control devices, an identification information storagestoring a self-identification information, and a communication processing unittransmitting the operation information acquired by the operation information acquisition mechanism to an external terminal with the self-identification information stored in the identification information storageat different timings for each of the fluid control devices A.

Fluid control apparatus, fluid control device, and operation analysis system

A diaphragm valve includes a valve body that defines a flow path through which fluid flows and an opening that opens to the outside in a middle of flow path; a flexible partition member that covers the opening and separates the flow path from the outside, and changes a cross-sectional area of the flow path; and a flexible support member disposed on a rear surface side opposite to a flow path side of the flexible partition member. A housing is fixed to the valve body via peripheral portions of the flexible partition member and the flexible support member. A humidity sensor that detects a state of an atmosphere or a change thereof in a space defined by the flexible support member and an inner surface of the housing. The diaphragm valve is capable of preventing fluid in a diaphragm valve from leaking to the outside due to breakage of a diaphragm.

Diaphragm valve and monitoring method thereof with improved leak detection

An electromagnetic valve has an inlet port and an outlet port. The electromagnetic valve is configured to open and close a driving fluid passage communicating the inlet port and the outlet port. The electromagnetic valve includes: a housing; a solenoid that includes a bobbin having a coil wound therearound; a moving core that is provided on an axis of the bobbin and is disposed movably in an axial direction; a stationary core that is provided on the axis of the bobbin and is fixed in the housing; and a valve that is configured to be movable together with the moving core and opens and closes the driving fluid passage. The inlet port is opened on one surface side of the housing in the axial direction of the bobbin while the outlet port is opened on the other surface side of the housing in the axial direction of the bobbin.

Electromagnetic valve, valve device, fluid control device, and electromagnetic valve replacement method

A work management apparatus, method, and system enable to accurately manage position, tightening torque and other information for all fastening parts, for tightening work using a tool with a torque sensor. The system includes: a driver provided with a torque sensor; and first and second cameras that capture images of a product from different viewpoints. The torque sensor starts measurement of the tightening torque when a detected tightening torque exceeds a set threshold value, stops measurement of the tightening torque when the measurement data satisfies a predetermined condition, and outputs torque related data that includes measurement time. The system further includes: a PC that calculates coordinates of an engagement position of a bit from a plurality of image data captured by the first and the second cameras corresponding to the measurement time included in the torque related data; and a marker mounting device provided with a marker and removably mounted to the bit.

Work management apparatus, work management method, and work management system

A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.

Valve device, flow rate control method, fluid control device, semiconductor manufacturing method, and semiconductor manufacturing apparatus using the valve device

A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. The fluid control device includes a valve body in which the flow path is formed, a diaphragm isolating a closed space from the flow path, a bonnet forming the closed space between the diaphragm and providing a penetration hole connected to the closed space and penetrated to be able to vertically move a diaphragm retainer, the diaphragm retainer vertically moving in the penetration hole to press the diaphragm and providing an increased diameter portion not to be removed from the penetration hole, a pressure sensor detecting a pressure inside of the closed space, and an elastic body interposing between the increased diameter portion of the diaphragm retainer and the bonnet inside of the closed space and elastically expanding and deflating between the increased diameter portion of the diaphragm retainer and the bonnet as the diaphragm retainer vertically moves.

A fluid control device, capable of acquiring data related to an internal operation of a device, is provided. The Fluid control device V includes a bonnet part installing sensors for detecting the internal operation of the fluid control device and a valve body containing the bonnet part inside, and the valve body has a recess for containing the bonnet part and a slit, leading a communication cable connected to the sensors to the outside, opening one end on an opposite side of a base where a flow path is formed, and penetrating from an outside to the recess.

A cause of abnormality of a fluid control device and/or data with which abnormality can be predicted can be collected to be analyzed, and abnormality can be predicted based on a result of the analysis. A fluid control deviceand a serverare configured to be able to communicate with each other through networks NWand. The fluid control deviceincludes an operation information acquisition mechanism that acquires a plurality of types of operation information about the fluid control device. The serverincludes a determination processing unitthat determines whether the fluid control devicehas an abnormality, an information collection unitthat collects the operation information and an abnormality determination result for the fluid control device, an information storage unitthat stores the operation information and the determination result collected, an information extraction unitthat refers to the information storage unit, and extracts, analysis target including same predetermined operation information and another of the operation information as well as information related to the determination result, selectively for each of a plurality of the fluid control devices, and a correlation analysis unitthat analyzes correlation between a predetermined operation of the fluid control deviceand occurrence of abnormality through comparison using the information extracted.

System, method, and computer program for analyzing operation of fluid control device

To diagnose an abnormality of a fluid control device from an operation of an entire fluid supply line including a plurality of fluid control devices. Provided is an abnormality diagnosis method of a fluid supply line including a plurality of fluid control devices F, V, and Vcommunicating with each other fluid-tightly. The abnormality diagnosis method has: a valve operation step of opening/closing any one or more of a valve FV in a flow rate control device, a valve V, and a valve V; a pressure adjustment step of setting a part or all of flow passages Rand Rleading from the valve Vto the valve Vvia the flow rate control device to a vacuum state or a pressurization state; a pressure detection step of acquiring temporal pressure characteristics in a flow passage of the flow rate control device F by pressure detection mechanisms Pand P; and an abnormality determination step of comparing pressure characteristics at the time of abnormality diagnosis acquired by the pressure detection mechanisms Pand Pand pressure characteristics at the time of normality measured in advance under the same conditions, and determining whether or not there is an abnormality.

Growing community of inventors

Osaka, Japan

Ryutaro Tanno