Fujikin Inc.

Other

Tadahiro Ohmi

Ryutaro Nishimura

Nobukazu Ikeda

Kouji Nishino

Masaaki Nagase

Ryousuke Dohi

Michio Yamaji

Kenji Yamamoto

Shigeru Itoi

Kyousuke Dohi

Tsutomu Shinohara

Takashi Hirose

Tetsuya Kojima

Taichi Kitano

Hirokatsu Maeda

Takeshi Hirohata

Hisaji Tanazawa

A diaphragm valve and a seat holder unit for the diaphragm valve which allows easy replacement of a seat is provided. The diaphragm valve includes a retainer configured to hold a seat holder. The seat holder is demountably arranged on a body to hold a seat. The retainer has a substantially cylindrical shape and includes an inward flange portion receiving the outer peripheral edge portion of the seat holder, and is demountably mounted on the diaphragm holding members in a state of holding the seat holder.

Diaphragm valve and seat holder unit for diaphragm valve

The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps' of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps&#x2032; which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.

Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used

A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2-step actuator operating pressure Pa to an actuator operated-type valve, a vibration sensor removably secured to the pipe passage on the upstream side of the actuator operated-type valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc to the electro-pneumatic conversion device for controlling the step operating pressure Ps' of the 2-step actuator operating pressure Pa so that, with the control signal Sc being regulated, the electro-pneumatic conversion device outputs the 2-step actuator operating pressure Pa with the step operating pressure Ps&#x2032; capable of bringing the vibration detection signal Pr substantially to zero.

Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method

A locking device comprises a stopper support fixed to the body of a fluid controller, and a stopper nonrotatably mounted on the stopper support and engageable with a channel opening-closing handle for preventing the rotation of the handle. The stopper mounted on the support is movable upward and downward between a locking position wherein the stopper engages with the handle and an unlocking position wherein the stopper is out of engagement with the handle. The stopper support is formed with an opening for fitting the controller body therein and an aperture for fitting the stopper therein. The stopper has a vertical portion slidably fitted in the aperture and formed with a lock attaching bore.

Device for locking channel opening-closing handle of fluid controller

A fluid controller comprises a pivotal member pivotally movable about the axis of a horizontal pin, a pair of rollable rollers rotatably supported by the lower end of the pivotal member and having an axis in parallel to the axis of the horizontal pin, a slope provided by the upper surface of a bonnet for allowing each roller to roll therealong in a plane orthogonal to the axis of the roller, and a stopper supported by the pivotal member so as to be movable between a position to engage with a valve stem and a position to be out of engagement therewith. The pivotal member is pivotally moved to roll the rollers along the slope and move the roller-supporting pivotal member upward or downward with the rolling movement, whereby the horizontal pin is raised or lowered.

Fluid controller with pivoting valve stem operator

A ring divided in two is fitted around a valve stem at a portion thereof projecting upward beyond a piston, with a C-ring fitted around the divided ring. The divided ring has an annular projection formed on its inner periphery and fitted in an annular groove which is formed in the valve stem at the portion thereof projecting upward beyond the position. The divided ring is formed in its outer periphery with an annular recess having fitted therein the inner peripheral portion of the C-ring.

Fluid controller

This invention relates to a granular phenolic resin forming material. Grains are obtained by pulverizing a hardened phenol resin or epoxy resin, particularly a waste, having aromatic rings. The grains are heated to react with a phenolic substance, to solubilize at least surfaces thereof, whereby the grains are made formable again. The pulverized, hardened grains and the phenolic substance, preferably a phenol, are mixed in the ratio of 100/10 to 100/90. An acid catalyst may be used, as necessary, in a quantity not exceeding 9 parts. A preferred reaction temperature is 80.degree. to 180.degree. C. at atmosphere pressure. The forming material of this invention may be formed with hexamine compounded therewith.

Phenolic resin forming material and method of manufacturing same

An inner peripheral portion of a metallic diaphragm (11) having a mounting hole (11a) at a central portion is held between a metallic welding fitting (8, 8') and a metallic holding member (6, 17), each respectively having an annular flat portion (8a, 6a, 17a) to contact an inner peripheral portion. The inner peripheral portion of the metallic diaphragm and the portions of the metallic welding fitting and the metallic holding member contacting the inner peripheral portion of the foregoing metallic diaphragm are welded at W', W' along entire peripheries thereof in order to secure these three components together as one body.

Structure for sealing an inner peripheral portion of a metallic diaphragm

A valve body is provided with a gas feed passage having an inlet and an outlet, a tank chamber, and a branch passage having a first portion connected between the gas feed passage and the tank chamber and an outlet extending from the tank chamber to a side of the valve body. A first valve is mounted on the valve body and selectively opens and closes the gas feed passage at a point downstream of the junction of the branch passage with the gas feed passage. A second valve is mounted on the valve body and selectively opens and closes the branch passage at a point between the tank chamber and the junction of the branch passage and the gas feed passage. A vacuum pump is provided to evacuate the tank chamber. When the first valve is open and the second valve is closed, gas may flow from an inlet pipe, through the gas feed passage and the first valve to a semiconductor process chamber. When the first valve is closed and the second valve is opened, residual gas in piping upstream of the inlet is evacuated through the branch passage and the second valve by the vacuum in the tank chamber. The first valve isolates the process chamber while the residual gas is being evacuated from the upstream piping.

Block valve with tank chamber

A fluid flow controller comprising a flow passage which is opened and closed by the flexing of a diaphragm secured at its periphery characterized in that the diaphragm is a laminate of a plurality of metal diaphragms and in that friction reducing material is provided between the diaphragms.

Growing community of inventors

Osaka, Japan

Ryutaro Nishimura