Edwards Japan Limited

Ryutaro Honma

Hideo Fukami

Kazuya Kasahara

A vacuum pump that allows for the identification of the noise immunities or the like of a master circuit and one or more slave circuits for controlling an operation of at least one portion included in the vacuum pump, and a controller used for such a vacuum pump are proposed. The present disclosure includes a control meansconfigured to control an operation of at least one portion included in a vacuum pump. The control meansincludes a slave circuitconnected to the at least one portion to control the operation of the at least one portion and a master circuitconnected to the slave circuitto control the slave circuit. The master circuitis configured to perform periodical communications with the slave circuitand obtain a history of communication states in the communications.

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Yachiyo, Japan

Ryutaro Honma