Kabushiki Kaisha Shinkawa

Mitsubishi Heavy Industries Limited

Ryuta Yamaguchi

Tohru Takamura

Tetsuya Goto

Noboru Fujino

Nobuyuki Shigeoka

Provided is a method for supplying a deposition material including a heating step of heating and evaporating a deposition material accommodated in a material accommodating section in which the deposition material is accommodated, a supply step of supplying the deposition material into the material accommodating section by feeding and melting a deposition material in a solid phase toward the melted deposition material in the material accommodating section, and a melted state detection step of detecting a melted state of the deposition material in the solid phase after supply in the supply step.

Method for supplying deposition material, method for producing substrate, control device and deposition device

A lead frame separating device which picks up lead frames stored in a lead frame magazine has downwardly urged detection probes which come in contact with the uppermost lead frame raised by a lead frame lift and a detection sensor which detects movement of the detection probes. With signals from the sensor, a chuck picks up the lead frame.

Lead frame separating device

A plate base fixing structure including positioning pins provided on either a plate base or plate base fixing block, positioning holes provided in one of the two members which has no positioning pins, the positioning pins being inserted the positioning holes, and a negative-pressure suction hole opened in the plate base fixing block so that the suction hole lets the negative pressure pass to the plate base fixing block. Thus, the plate base is mounted on the plate base fixing block by suction adhesion obtained as a result of the negative pressure.

Growing community of inventors

Tokyo, Japan

Ryuta Yamaguchi