Hitachi High-tech Science Corporation

Hitachi High-tech Corporation

Ryusuke Hirose

Haruo Takahashi

Hideyuki Akiyama

Noriaki Sakai

Masafumi Watanabe

Yoshiki Matoba

Koichi Tamura

Toshiyuki Takahara

Isao Yagi

Disclosed is an apparatus and method for analyzing an evolved gas, wherein the precision of detection of a gas component is improved without enlarging the apparatus. The apparatus includes a gas component evolving unit, a detection member for detecting the gas component, and a mixed gas channel for allowing a mixed gas containing the gas component and carrier gas to flow therethrough, and further includes a branch channel branched from the mixed gas channel, an inert gas channel for allowing an inert gas to flow therethrough, a first flow rate regulator for adjusting the flow rate of the carrier gas, a second flow rate regulator for adjusting the flow rate of the inert gas, and a flow rate control unit for controlling the second flow rate regulator such that the flow rate of the mixed gas guided to the detection member is a predetermined value.

Apparatus and method for analyzing evolved gas

The apparatus for mass analysis includes: a heating unit heating a sample containing a first substance and a second substance having different gasification temperatures to evolve gas components; a heating control unit controlling the heating unit to heat the sample at a first temperature point at which gas of the first substance is evolved and gas of the second substance is not evolved, until reaching a first time point, whereafter the heating unit is controlled to heat the sample until reaching a second temperature point at which gas of the second substance is evolved; and an analysis control unit performing mass analysis under a first measurement condition assigned to the first substance until reaching the first time point at the first temperature point, and performing mass analysis under a second measurement condition assigned to the second substance at the second temperature point.

Apparatus for and method of mass analysis

The present invention provides an X-ray generator including an X-ray tuberadiating primary X-rays Xto a specimen S, a housingaccommodating the X-ray tube, an X-ray radiation area controllerlimiting the radiation area of the primary X-rays Xfrom the X-ray tubeto the specimen S, and a device holderholding the X-ray radiation area controllerwith respect to the housing. The X-ray tube includes a case, an electron ray sourcegenerating electron rays, and a target unithaving a base fixed to the case and receiving electron rays through a protruding free end. The device holder has a fixed-basefixed to the housing, directly under the base of the target unit, and a supporting extensionextending from the fixed-base in the protrusion direction of the target unit and supporting the X-ray radiation area controller.

X-ray generator and fluorescent X-ray analyzer

An X-ray analyzer is provided with: a sample stage on which a sample is disposed; an X-ray source configured to irradiate the sample with a primary X-ray at a first angle; a detector configured to detect a secondary X-ray generated from the sample; a position adjustment mechanism configured to adjust a relative position between the sample stage and the primary X-ray; a first light source configured to emit a first light beam at a second angle toward a focal position of the primary X-ray or toward a predetermined position; and a second light source configured to emit a second light beam at a third angle toward the focal position or toward the predetermined position, wherein the first light beam and the second light beam are configured to have visibility sufficient for enabling visual distinction.

X-ray analyzer

An X-ray fluorescence analyzer includes: a measurement device having: an X-ray source that emits an X-ray; an irradiation area restricting member that restricts an area of a measurement sample to be irradiated with the X-ray as a primary X-ray; and a detector that detects a secondary X-ray generated from the measurement sample. The analyzer further includes: a sample stage that holds and moves the measurement sample between a measurement position at which the measurement sample is irradiated with the primary X-ray to detect the secondary X-ray by the detector and a first retracted position at which the measurement sample is retracted from the measurement position; and a calibration sample moving mechanism that holds a calibration sample for calibrating the measurement device and moves the calibration sample between the measurement position and a second retracted position at which the calibration sample is retracted from the measurement position.

X-ray fluorescence analyzer

An X-ray fluorescence spectrometer includes: an X-ray source which irradiates a sample with primary X-rays; a light condensing device which condenses the primary X-rays to reduce an irradiation area on the sample; a detector which detects fluorescent X-rays produced from the sample irradiated with the primary X-rays; a housing which accommodates the X-ray source and the light condensing device; a temperature sensor which is disposed in at least one of the X-ray source and the periphery of the X-ray source; at least one external-air fan which is disposed on the housing, and which can exchange internal air with external air; and a control section which drives the external-air fan based on temperature information detected by the temperature sensor, to adjust the ambient temperature around the X-ray source to a constant temperature.

Growing community of inventors

Tokyo, Japan

Ryusuke Hirose