Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Shin-Etsu Chemical Co., Ltd. (1 from 5,984 patents)
1 patent:
1. 11940391 - Defect inspection apparatus, method for inspecting defect, and method for manufacturing photomask blank