Agc Inc.

Ryujiro Yamasaki

Susumu Saito

Norihide Sugiyama

Shinji Wada

Masahiro Ito

Yoshihiko Sakane

Masahiro Ohkura

Akihiko Asakawa

A coating composition which contains a fluorinated polymer having a unit (1) represented by &#x2014;[CXX&#x2014;CY(Rf&#x2014;COOM)]&#x2014; and a fluorinated compound represented by CXX&#x2550;CY(Rf&#x2014;COOM), wherein the content of the fluorinated compound is from 0.1 to 8.0 parts by mass per 100 parts by mass of the fluorinated polymer. X, X, Xand Xare H, F or Cl, Yand Yare H, F, Cl, a methyl group or a trifluoromethyl group, Rfand Rfare a perfluoroalkylene group which may contain an etheric oxygen atom between carbon-carbon atoms, or an oxyperfluoroalkylene group which may contain an etheric oxygen atom between carbon-carbon atoms, &#x2014;COOMis &#x2014;COOH or &#x2014;COOZ, and &#x2014;COOMis &#x2014;COOH or &#x2014;COOZ(wherein Zand Zare an ammonium ion in which the hydrogen atom may be substituted). The coating composition is suitable for forming a thin antireflection coating layer without increasing its refractive index.

Coating composition, and process for producing photoresist laminate

To provide a process for producing a fluorinated crosslinked product which is excellent in stability and produces less HF. A process for producing a fluorinated crosslinked product, which comprises irradiating a fluorinated polymer having a unit represented by the following formula (1), with active energy rays having a wavelength of from 150 to 300 nm: wherein Xand Xare each independently a hydrogen atom or a fluorine atom, Ris a fluoroalkylene group or a fluoroalkylene group having at least two carbon atoms and an etheric oxygen atom between carbon-carbon atoms, Qis a single bond or an etheric oxygen atom, and Zis OH, ORor NRR, wherein Ris an alkyl group, and Rand Rare each independently a hydrogen atom or an alkyl group.

Process for producing fluorinated crosslinked product and use thereof

Growing community of inventors

Chiyoda-ku, Japan

Ryujiro Yamasaki