Anelva Corporation

Hitachi, Ltd.

Koyo Seiko Company, Ltd.

Ryuji Sugimoto

Nobuyuki Takahashi

Yasuyuki Shirai

Shigeru Kobayashi

Susumu Aiuchi

Tsuneaki Kamei

Katsuo Abe

Hideki Tateishi

Taisaku Hashimoto

Masashi Nakatsukasa

Shigemi Miki

Hiroshi Ii

A magnetic drive device comprises a hollow cylindrical outer rotor, an inner rotor inserted in the outer rotor so as to proejct at least at one end thereof beyond an end of the outer rotor and supported rotatably relative to the outer rotor, two magnetic bearings arranged around the outer rotor and spaced apart axially thereof for holding the outer rotor radially thereof, a first magnetic coupling having a drive portion disposed around the outer rotor for transmitting a torque to the outer rotor, and a second magnetic coupling having a drive portion disposed around the inner rotor at a portion thereof projecting beyond the end of the outer rotor for transmitting a torque to the inner rotor.

Magnetic drive device

In a substrate processing apparatus, a substrate is processed to form a thin film thereon while it is maintained in the vertical direction, Furthermore, the rear surface of the substrate is cooled by a substrate cooling mechanism which contacts the rear surface thereof. The substrate cooling mechanism moves in a reciprocating fashion, whereas a substrate holder for holding the substrate moves both in horizontal and vertical directions.

Substrate processing apparatus including wafer transporting and

In an automatic loader for automatically loading a flat unprocessed substrate to a substrate processing apparatus for processing the flat substrate and automatically unloading a processed substrate, the automatic loader has: a plurality of cassette stages for vertically moving cassettes having a plurality of substrates held horizontally and parallel to each other; a first substrate convey mechanism contacting a single door of the substrate processing apparatus and forming a common conveyance path of all substrates; a single substrate posture control stage arranged in contact with the first convey mechanism to correct a posture of the substrate to be fed in the substrate processing apparatus; second substrate convey mechanisms for forming at least one conveyance path between the plurality of cassette stages and the substrate posture control stage and exchanging and conveying the substrate; and substrate counters arranged in the respective conveyance paths of the second substrate convey mechanisms. The processed substrates are returned to the original cassette.

Automatic loader

An apparatus for performing continuous treatment in vacuum including an inlet chamber, a first intermediate chamber, at least one vacuum treating chamber, a second intermediate chamber and a withdrawing chamber arranged in the indicated order in a direction in which base plates are successively transferred. An opening device normally closed and opened when a base plate is transferred therethrough is mounted on a wall at the inlet of the inlet chamber, between the adjacent chambers and on a wall at the outlet side of the withdrawing chamber. A conveyor device for conveying each base plate in a horizontal direction through the opening device is mounted in each of the chambers, and an evacuating device is also mounted in each chamber. A base plate storing device for storing a plurality of base plates in a magazine is mounted in the first and second intermediate chambers. At least one vacuum treating device is mounted in the vacuum treating chamber.

Apparatus for performing continuous treatment in vacuum

Growing community of inventors

Tokyo, Japan

Ryuji Sugimoto