Hitachi High-Tech Corporation

Ryuichirou Tamochi

Sayaka Kurata

A microstructure evaluation system or detecting a fluctuation caused by an imaging device, including a feature data extraction unit configured to extract first feature data from an image captured by an imaging device while changing an observation field of view on a sample; and a fluctuation evaluation unit configured to calculate a long-term fluctuation of the first feature data, return an observation field of view to a position before occurrence of the long-term fluctuation and re-capture an image when the long-term fluctuation exceeds a predetermined criterion, and calculate a difference between the first feature data of the captured image at the position before the occurrence of the long-term fluctuation and the first feature data of the re-captured image. The fluctuation evaluation unit determines that the long-term fluctuation is a fluctuation caused by the imaging device when the difference is equal to or greater than a predetermined threshold.

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Tokyo, Japan

Ryuichirou Tamochi