Jsr Corporation

Ryuichi Saitou

Hisashi Nakagawa

Tatsuya Sakai

Shunsuke Kurita

A semiconductor device production composition comprises a product obtained by mixing a metal compound and a compound represented by Formula (1) in a first organic solvent, and a second organic solvent. R and R' each independently represent a hydrogen atom, a linear or cyclic alkyl group having a carbon number of 2 to 20, a linear or cyclic alkylcarbonyl group having a carbon number of 2 to 20, an aryl group having a carbon number of 6 to 20, or an aryloxy group having a carbon number of 6 to 20, and part of the hydrogen atoms in the cyclic alkyl, cyclic alkylcarbonyl, aryl, or aryloxy group are substituted or unsubstituted.R&#x2014;O&#x2014;O&#x2014;R&#x2032;&#x2003;&#x2003;(1)

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Tokyo, Japan

Ryuichi Saitou