Seiko Epson Corporation

Ryuichi Kurosawa

Masahiro Fujii

Fumio Takagi

Shinichi Kamisuki

Shinichi Yotsuya

Nobukazu Nagae

Daisuke Sawaki

Takeshi Miyashita

Mitsuro Atobe

Seiya Sato

Naoki Tomikawa

Takenori Hirota

A vibration device includes a base, a vibrator disposed at the base, an annular resin element that is bonded to the base and surrounds the vibrator in a plan view, and a lid so disposed that the vibrator is sandwiched between the base and the lid. A first metal layer is disposed at a surface of the resin element, the surface facing the lid. A second metal layer is disposed at a surface of the lid, the surface facing the resin element. The vibrator is encapsulated by the base, the resin element, and the lid when the first metal layer and the second metal layer are bonded to each other.

Vibration device

A vibration device includes a semiconductor substrate having a first surface at which an integrated circuit is provided and a second surface that is a rear surface with respect to the first surface, which is a front surface, a vibration element disposed at the first surface, a lid having a recess that opens toward the first surface and a contact surface that is in contact with the first surface, the lid being bonded to the first surface via the contact surface, and a metal layer disposed between the first surface and the contact surface, and at least part of the integrated circuit overlaps with the metal layer in a plan view viewed in the direction of a normal to the first surface.

A resonator device includes a base substrate that is formed of a single crystal semiconductor and includes a first surface, a resonator element attached to the first surface of the base substrate, and a cover that is bonded to the first surface of the base substrate, accommodates the resonator element between the cover and the base substrate, and is formed of a single crystal semiconductor. The base substrate and the cover are bonded through an amorphous layer.

Resonator device, resonator module, electronic apparatus, and vehicle

A resonator device includes a base, a resonator element attached to the base, a cover accommodating the resonator element between the base and the cover, and a conductive bonding member positioned between the base and the cover and bonding the base to the cover. The base includes a resonator element mount surface on which the resonator element is attached, a first interconnect and a second interconnect that are arranged on the resonator element mount surface and that are electrically coupled to the resonator element, a bonding surface bonded to the cover through the bonding member, and a step between the resonator element mount surface and the bonding surface.

In a projection type display apparatus, a lighting device includes two reflection type cutoff filters (first cutoff filter and reflective second cutoff filter) which block out ultraviolet range light on an output optical path from a light source. A cut on wavelength of the second cutoff filter on the front side is longer than that of the first cutoff filter on the rear side. The two cutoff filters are formed on planar-shaped first faces of a first integrator lens and a second integrator lens. For this reason, both input faces of the two cutoff filters are orthogonal to an apparatus optical axis.

Projection type display apparatus and lighting device

A liquid crystal device includes: a first substrate; a second substrate that is disposed facing the first substrate; a liquid crystal layer that is sandwiched between the first substrate and the second substrate and is composed of a liquid crystal exhibiting, in an initial alignment state thereof, a vertical alignment and having negative dielectric anisotropy; a light shielding film that is formed on a side of the liquid crystal layer on the first substrate and that corresponds to a non-display region and defining a display region; a pixel electrode that is disposed, on the first substrate, from the display region with a periphery projecting on the light shielding film; a vertical alignment film that is disposed, on the pixel electrode, only in the display region or from the display region with a periphery projecting in the non-display region; and a horizontal alignment film that is disposed, in an area without the vertical alignment film above the light shielding film, with a periphery projecting on the pixel electrode.

Liquid crystal device and manufacturing method therefor, and electronic apparatus

An alignment film for controlling orientation of liquid crystal molecules is formed of an organic silicon material which includes in its molecule an affinity imparting group for enhancing affinity to the liquid crystal molecules and an orientation characteristic imparting group for controlling orientation of the liquid crystal molecules. The affinity imparting group is at least one selected from the group comprising a vinyl group, an alkylene group, and a cyanoalkyl group, and the orientation characteristic group is at least one selected from the group comprising a phenyl group, a substituted phenyl group, a phenyl-alkyl group, a substituted phenyl-alkyl group, a branched alkyl group having carbon atoms of 3 to 12. Preferably, the organic silicon material includes organopolysilsesquioxane having a cage structure or a partially cleaved cage structure. A liquid crystal panel having the alignment film, and electronic equipment provided with the liquid crystal panel are also provided.

Alignment film, method of forming the alignment film, liquid crystal panel, and electronic equipment

Provided is technology capable of avoiding complex processes and high costs while securing the protection of the functional unit upon forming a device including a glass substrate. A manufacturing method of a structural body structured with a bonding body formed from a glass substrate and a semiconductor substrate, including a first step of forming a first functional unit as a structural element of the structural body on one face of the glass substrate; a second step of bonding the semiconductor substrate to one face of the glass substrate so as to cover the first functional unit; a third step of forming an affected zone extending in the thickness direction of the glass substrate by irradiating a laser beam from the other face side of the glass substrate and scanning the focal point of the laser beam in the thickness direction of the glass substrate; and a fourth step of forming a hole in the glass substrate by etching the glass substrate and removing the portion along the affected zone.

Method of manufacturing a structure body bonding with a glass substrate and semiconductor substrate

A liquid dispense head is provided which can be manufactured at a reduced manufacturing cost, will not react with dispense liquid containing biomolecules, and can dispense liquid droplets having a constant amount from individual nozzles. The liquid dispense head has reservoirs used as reservoirs for containing liquid, pressure chambers for applying a pressure to dispense the liquid, flow passages connecting the pressure chambers and the respective reservoirs. In the liquid dispense head described above, a part of the flow passage is formed of a minute through-hole provided in a glass substrate, and the inside diameter of the minute through-hole is continuously decreased or increased.

Liquid dispense head and manufacturing method thereof

A small droplet discharging device is provided capable of producing high-density arrays. The droplet discharging device comprises a first substrate comprising a plurality of reservoir chambers for holding a liquid, a second substrate comprising a plurality of discharge units comprising supply openings for receiving a supply of a liquid stored in the reservoir chambers, pressurizing chambers for applying a pressure to the liquid supplied from the supply openings, and discharge openings for discharging the liquid pressurized in the pressurizing chambers to the outside, and a third substrate sandwiched between the first substrate and the second substrate and comprising channels for connecting the plurality of reservoir chambers with the plurality of supply openings corresponding thereto, wherein the plurality of supply openings provided in the second substrate are arranged such that relative positions thereof have a zigzag disposition.

Droplet discharging device

To provide a mirror device, an optical switch, an electronic instrument, and a mirror device driving method in which a large driving displacement can be produced for a mirror with a smaller driving force, a silicon substrate includes: at least one first mirror-side operating region integrally formed with the mirror and provided at a different position from the mirror; and at least one second mirror-side operating region provided at an end portion of the mirror, and a glass substrate includes: an opposite-side operating section, a coulomb force acting between the first mirror-side operating region and the opposite-side operating section; and another opposite-side operating section, the coulomb force acting between the second mirror-side operating region and the other opposite-side operating section. The glass substrate is formed so that a gap between the first mirror-side operating region and the opposite-side operating section is narrower than a gap between the second mirror-side operating region and the opposite-side operating section.

Electronic instrument having mirror device

In a method of filling an ink-jet head of an ink-jet type printing apparatus with a liquid stored in an ink cartridge or in a reservoir tank, the head is filled up to the tip of nozzles by bringing a suction cap into close contact with a nozzle opening face of the ink-jet head via a gas-permeable filters and drawing the air inside the suction caps with a pump.

Ink-jet printing apparatus, method of filling liquid in ink-jet head thereof, apparatus for manufacturing micro-array and method of filling liquid in ejection head thereof

Mirror device, optical switch, electronic instrument and mirror device driving method

A method of manufacturing a light modulator in which micromirrors are tilted by an electrostatic force generated by an electrical potential difference between drive electrodes and the micromirrors. The method includes integrally forming support sections disposed at fulcrum points for tilting the micromirrors and axis portions forming axes for tilting the micromirrors.

Growing community of inventors

Okaya, Japan

Ryuichi Kurosawa