Screen Holdings Co., Ltd.

Takiron Co., Ltd.

Ryuichi Kimura

Yasuo Shikinami

Kunihiro Hata

Kosuke Iida

Yoshinobu Yoshikawa

Naruhisa Miyazaki

Hiroakira Matsui

A substrate processing system includes substrate processing apparatuses and a group management device. The substrate processing apparatuses each include a plan creating section. The plan creating section creates a plan indicating a timing when a processing liquid is used and a flow rate of the processing liquid. The processing liquid is supplied to the substrate processing apparatuses from a single resource system. The group management device includes a processing section. The processing section determines whether the total flow rate of the processing liquid to be used by the substrate processing apparatuses exceeds a threshold value based on the plans created by the substrate processing apparatuses. When determining that the total flow rate exceeds the threshold value, the processing section instructs one of the substrate processing apparatuses to adjust the plan thereof.

Substrate processing system and group management device

A process for producing a photodegradable rubber foamed products of excellent softness, which comprises mixing 1,2-polybutadiene with 0.1 to 3.0% of a photosensitizer and with a thermally decomposable foaming agent, irradiating with ultraviolet ray of a wavelength of 240 to 400 m.mu. for 10 minutes or less to form a cross-linked material having a gel fraction of 30 to 80% (in boiling toluene; 7 hours), and heating to 150 to 230.degree. C. to form a foamed product. In particularly preferred embodiments of this invention, the foaming agent is p,p'-oxybis (benzenesulfonylhydrazide).

Radiation process for producing 1,2-polybutadiene foamed products

Growing community of inventors

Kyoto, Japan

Ryuichi Kimura