Yokogawa Electric Corporation

Ryuichi Jimbo

Yutaka Koizumi

Yutaka Ono

Yasuhito Kosugi

Atsufumi Kimura

Shigeru Hashida

Fumio Kaiho

A two-dimensional positioning apparatus for positioning an object in a two dimensional direction, wherein are provided a platen, a slider having two X-axis motors and sensors and a Y-axis motor and sensor disposed above the platen, a converter for providing signals to detect the X-axis position of the center point of the slider, a controller for feedback control of the slider in a X-axis direction and a yaw direction, and for feedback control in the Y-direction, and a converter circuit for converting output of the controller to propulsion commands to be supplied to the motors, wherein a limiter is provided to restrict one axis limits of the propulsion commands. In this manner, accuracy is improved and flexibility is increased.

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Tokyo, Japan

Ryuichi Jimbo