Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Screen Semiconductor Solutions Co., Ltd. (2 from 49 patents)
2 patents:
1. 10216099 - Substrate processing apparatus
2. 9494877 - Substrate processing apparatus