Asahi Glass Company, Limited

Pacific Rundum Company Ltd.

Ryuhei Makimura

Takuro Ono

Nobuo Kageyama

Hideji Numata

Koji Furukawa

High purity silicon carbide parts for a heat treating apparatuses for semiconductors; composed mainly of .alpha.-type silicon carbide and silicon; characterized in that a particle sizes of the .alpha.-type silicon carbide crystals composing the high purity silicon carbide parts are not larger than 44 .mu.m; a weight mean particle size of the .alpha.-type silicon carbide crystals is in a range from 2 to 25 .mu.m; high purity silicon is filled up among the particles of the .alpha.-type silicon carbide crystals; and a content of iron as an impurity element contained in the high purity silicon carbide parts is not larger than 5 ppm.

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Toyama, Japan

Ryuhei Makimura