Tokyo Electron Limited

Tokyo Electron Limi Ted

Ryu Kitahara

Junya Sato

Toshiyuki Kobayashi

Tatsuya Miura

Kazumune Ono

Toshihiro Ohno

Shun Suto

Kazuya Koshiishi

Toshimitsu Chiba

Shoko Endo

Mitsuru Sasaki

A teaching method according to an embodiment is for a transfer device including a substrate holding unit including a suction port for holding a substrate by applying suction, an actuation mechanism for moving the substrate holding unit, and a pressure detecting unit for detecting a pressure in a suction path communicating with the suction port. The method includes: moving the substrate holding unit under the substrate; moving the substrate holding unit upward toward the substrate, while applying suction to the suction path and detecting the pressure in the suction path; determining whether or not the substrate holding unit has touched the substrate, based on the pressure in the suction path; and storing, as a standard position, a position of the substrate holding unit at a time of determining that the substrate holding unit has touched the substrate.

Teaching method of transfer device

A substrate processing apparatus is provided that includes a control part configured to control a substrate process in accordance with a processing procedure set in a process recipe. The process recipe is linked to a plurality of partial recipes obtained by dividing the processing procedure into functions. The control part controls the substrate process in accordance with processing procedures set in the linked plurality of partial recipes.

Substrate processing apparatus, substrate processing method and substrate processing program

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Miyagi, Japan

Ryu Kitahara