Adv Antest Corporation

Hitachi Information & Communication Engineering, Ltd.

Hitachi Information & Teleommunication Engineering, Ltd.

Ryozo Yoshino

Takamasa Satoh

Takamasa Sato

Atsushi Higashino

Koichi Hidaka

A DA conversion device includes a current output type DA converter, a high-speed operational amplifier operating at a low voltage and configured to generate a voltage corresponding to an output current from the DA converter, and a buffer amplifier connected to an output terminal of the high-speed operational amplifier and operating at a high voltage. The device also includes positive and negative floating power supplies separated from a power supply system and provided as power supplies for driving the DA converter and the high-speed operational amplifier. A midpoint between potentials at the floating power supplies is connected to an output terminal of the buffer amplifier to cause the DA converter and the high-speed operational amplifier to operate mainly based on an output voltage from the buffer amplifier.

DA conversion device and electron beam exposure system using the same

The present invention is related to a D/A conversion device, it is provided with a first D/A conversion circuit which receives input of digital data composed of plural bits and outputs a corresponding electric output signal, and a second D/A conversion circuit which receives input of a correction code for the digital data and which outputs a corresponding electric correction signal, wherein the first and second D/A conversion circuits are connected to each other at their respective output terminals so that the electric output signal is corrected by the electric correction signal. The D/A conversion device comprises: storing meansfor storing correction codes each for one bit of the digital data, the correction codes being determined in correlation with the first D/A conversion circuitand calculating meansfor performing serial entry and addition of the correction codes each for one bit of the digital data, and outputting a correction code for all bits of the digital data.

D/A conversion device and method and charged particle beam exposure apparatus and method

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Yokohama, Japan

Ryozo Yoshino