Tel-thermco Engineering Co., Ltd.

Ryozo Satoh

Seishiro Sato

Takeshi Inoue

In an apparatus for thermal treatment of semiconductors in a treating gas, a treating tube has a heating portion, an extending portion, and a sealing portion, and convection-preventing plates are disposed within a treating tube, between one end of the heating portion and the sealing portion, so as to interrupt currents of the treating gas. A heating element is arranged so that the quantities of heat generated along the heating portion are largest near a gas-discharging end of the heating portion, intermediate near a gas-discharging end thereof, and smallest therebetween. The plates are mounted to the sealing portion so as to be inserted into the treating tube when the sealing portion is attached and so as to be withdrawn from the treating tube when the sealing portion is detached. The plates may be mounted integrally to the sealing portion.

Apparatus for thermal treatment of semiconductors

In an apparatus for thermal treatment of semiconductors in a treating gas, a cylindrical plug extends into a treating tube so as to substantially fill the treating tube, as far as the cylindrical plug extends into the treating tube, except for a clearance provided around the cylindrical plug, between the cylindrical plug and the treating tube, whereby formation of convection currents in the treating gas is prevented. The cylindrical plug may be separate from a sealing closure, integral with the sealing closure, or integral with the treating tube. If integral with the treating tube, the cylindrical plug has a tubular portion and a bottom portion, which plugs the tubular portion but is removable.

As used in an apparatus for thermal treatment of semiconductors, a treating tube has a flanged portion at one end, near an outlet for a treating gas, and a sealing closure has a cylindrical portion and a flanged portion. The flanged portion of the sealing closure is adapted to be interfitted with the flanged portion of the treating tube so as to seal said end. The sealing closure is removable so as to open said end. The cylindrical portion is adapted to be inserted into the treating tank through said end so as to substantially fill the treating tube, as far as the cylindrical portion extends into the tube, except for a clearance provided around the cylindrical portion, between the cylindrical portion and the treating tube, whereby formation of convection currents in the treating gas is prevented. The flanged portion of the treating tube, a hollow interior of the sealing closure, and the flanged portion of the sealing closure are open to an outer atmosphere when the flanged portions are interfitted.

In an apparatus for thermal treatment of semiconductors, a substantially spherical portion of a cap for a tube is confined between distal ends of a plurality of members and distal ends of a plurality of springs, whereby problems arising from angular deviation are overcome. The framework supporting the cap confining means is biased toward the tube.

Cap-mounting mechanism for apparatus for thermal treatment of

A remote-controlled pressure regulator comprises a stepping motor, which is operatively connected to a tiltable arm engaging a connecting rod, so as to adjust loading of a pressure-regulating unit.

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Yamato, Japan

Ryozo Satoh