Fujikin Inc.

Other

Tokyo Electron Limited

Tohoku University

Nidec Copal Electronics Corporation

Tokushima University

Tadahiro Ohmi

Kabushiki Kaisha Fujikin

Fuiikin Incorporated

Fujilin Incorporated

Fujkin Incorporated

Ryousuke Dohi

Kouji Nishino

Nobukazu Ikeda

Kaoru Hirata

Masaaki Nagase

Katsuyuki Sugita

Takashi Hirose

Michio Yamaji

Tomio Uno

Atsushi Matsumoto

Kazuhiko Sugiyama

Atsushi Hidaka

Yohei Sawada

Eiji Ideta

Tsutomu Shinohara

Jun Hirose

Toshihide Yoshida

Naofumi Yasumoto

Satoshi Kagatsume

Osamu Nakamura

Kohei Shigyou

Toyomi Uenoyama

Hiroshi Koizumi

Koji Kawada

Hideki Nagaoka

Hisashi Tanaka

Tomokazu Imai

Shoichi Hino

Yukio Minami

Tadayuki Yakushijin

Ryutaro Nishimura

Kazuyuki Miura

Tsuyoshi Shimazu

Tetu Kagazume

Masahito Saito

Kazuhiro Yoshikawa

Akihiro Morimoto

Hiroyuki Fukuda

Katsunori Yonehana

Kazuo Fukazawa

Eiji Takahashi

Mutsunori Koyomogi

Takatoshi Nakatani

Kazuo Fukasawa

Susumu Ozawa

Seiichi Iida

Atsuo Tomita

Yoshihiro Satou

Osamu Fukada

Toshio Doh

Yasuyuki Shirai

Keiji Hirao

Takahiro Matsuda

Tsuyoshi Tanikawa

Atsushi Sawachi

Akihiro Harada

Kazunari Watanabe

Ryutaro Tanno

Yohei Uchida

Keisuke Ishibashi

Yoshihiro Deguchi

Masahiko Takimoto

Satoru Yamashita

Kenta Kondo

Takashi Funakoshi

Kazuyuki Tezuka

Norikazu Sasaki

Yoshinori Shimomura

Taiji Chiba

Kazuyuki Morisaki

Hiroshi Kannan

Keigo Kobayashi

Masakazu Nagao

Hideyuki Miyagawa

Yuto Kawauchi

Shinichi Ozaki

Masashi Kishi

Kenetu Mizusawa

Akniobu Teramoto

Makoto Saegusa

Shujiro Inui

Taiji Sakai

Masanori Ueyama

Kouji Kawata

Masaki Fukasawa

Katsumi Ishiguro

Masaki Nakagawa

Tooru Hirai

Atsushi Nagata

Tsuyoshi Tanigawa

A pressure sensor includes a cylindrical member configured to be attached to a body having a fluid passage, and a pressure sensor unit connected to the cylindrical member for detecting a pressure of a fluid flowing through the fluid passage, wherein the cylindrical member is made of a nickel-molybdenum-chromium alloy material or a stainless steel material, wherein the pressure sensor unit includes a sensor body closed at one end with a diaphragm and a pressure detecting element for outputting displacement of the diaphragm as pressure, and wherein the sensor body is made of a cobalt-nickel alloy material, and is connected at an opening side end portion to one end portion of the cylindrical member.

Diaphragm type pressure sensor arrangement having corrosion resistance and yield strength

To provide a flow rate regulating valve capable of detecting a state where a flow path is fully closed even when there is no lead wire or the like for detecting the state where the flow path is fully closed. A flow rate regulating valve is a fluid regulating valve including a valve body for opening and closing fluid flow paths provided in a body and includes an actuator unit for moving the valve body, and the actuator unit includes a drive motor, a slider moved by a rotation of the motor, a cylindrical body mounted on the slider, and a shaft interlocked with the cylindrical body and provided with the valve body fixed to a distal end thereof. The motor is a stepping servomotor, and has a pressing control function for moving the valve body in the closing direction at a continuous rated torque.

Flow rate regulating valve and fluid control apparatus using the same

A self-diagnosis method of a flow rate control device includes: a step (a) for measuring a pressure drop characteristic after a pressure control valve () has been changed to a closed state from a state where a fluid flows from the upstream side of the pressure control valve with the opening of a flow rate control valve () is larger than a restriction part; a step (b) for measuring the pressure drop characteristic after the pressure control valve has been changed to the closed state from a state where the fluid flows from the upstream side of the flow rate control valve to the downstream side with the opening of the flow rate control valve is smaller than the restriction part; a step (c) for determining whether there is an abnormality by comparing the pressure drop characteristic measured in step (a) with a corresponding reference pressure drop characteristic; a step (d) for determining whether there is an abnormality by comparing the pressure drop characteristic measured in step (b) with a corresponding reference pressure drop characteristic; and a step (e) for determining that there is an abnormality in the flow rate control valve when it is determined that there is an abnormality only in the step (d).

Self-diagnosis method for flow rate control device

A piezoelectric element-driven valveincluding a main body, a valve element, piezoelectric actuators, a plurality of cylindrical actuator boxes arranged in series, a cylindrical outer connecting jig detachably connecting the adjacent actuator boxes and having an opening for drawing out wiring, a plurality of piezoelectric actuators accommodated in the actuator box respectively in the same direction, and a cylindrical inner connecting jig slidably accommodated in the outer connecting jig and having an opening for positioning the adjacent piezoelectric actuators and drawing out wiring.

Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device

A fluid controller is provided having a flow path through which a fluid can flow, a closed space separated from the flow path by an isolation member, and a leak port capable of communicating the closed space with an external part. An anomaly detection device for detecting an anomaly has a pressure sensor detachably fixed to the leak port, a pressure sensor for detecting the pressure in the closed space, a processing module for executing a predetermined information processing, and an detachable mechanism for blocking the leak port from the external part in the state of being fixed. The processing module determines an anomaly of the fluid controller by comparing a detection value detected by the pressure sensor to a predetermined threshold, and transmits a discrimination result of the anomaly of the fluid controller to a server.

Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller

A control device for a valve device can detect open/close state of the valve device without using limit switches. The valve device includes a diaphragm for opening and closing a flow path for flowing a fluid, a coil spring for biasing the diaphragm in the closing direction of flow path, a main actuator for driving it against the biasing force of the coil spring, and an adjusting actuator using a piezoelectric element for adjusting the opening degree of the flow path determined by the diaphragm. The controller detects the open/close state of flow path based on the voltage generated by the piezoelectric element of the adjusting actuator, and controls valve device using the detection signal.

Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus

Provided is a flow rate adjustment valve of a motor-operated valve type, which overcomes the problems that flow rate adjustment valves of a manual valve type have, while making full use of compactness the manual valves have. The flow rate adjustment valve includes a rotation device that rotates a rotation member to cause a vertically movable body to move vertically. The rotation device includes: a driven gear disposed at an upper end portion of the rotation member; and a motor that rotates a driving gear engaged with the driven gear. The motor, which is a stepping servo motor, is disposed below the driving gear and has a rotary shaft extending upward. The driving gear is fixed to an upper end portion of the rotary shaft.

Flow rate adjustment valve, and fluid control apparatus in which the flow rate adjustment valve is used

A flow rate control device () comprises: a pressure control valve () provided in a flow path; a flow rate control valve () provided downstream side of the pressure control valve; and a first pressure sensor () for measuring pressure on the downstream side of the pressure control valve and on the upstream side of the flow rate control valve. The flow rate control valve has a valve element () seated on/separated from a valve seat (); a piezoelectric element () for moving the valve element so as be seated on/separated from the valve seat; and a strain sensor () provided on a side surface of the piezoelectric element. The pressure control valve () is configured to control the pressure control valve () on the basis of a signal output from the first pressure sensor (), and to control the driving of the piezoelectric element of the flow rate control valve () based on a signal output from the strain sensor ().

Flow rate control device

A piezoelectric-element-driven valve includes a valve seat provided on a flow path, a valving element detachably seated on the valve seat, and a piezoelectric element, and is configured to move the valve body by extension of the piezoelectric element. The piezoelectric-element-driven valve also is provided with a detection mechanism for detecting an extension amount of the piezoelectric element, the detection mechanism including a strain sensor, and being capable of detecting an movement amount of the valving element from an output of the strain sensor.

Piezoelectric-element-driven valve and flow rate control device

A valve element movement mechanism includes: a first valve stem having one end portion to which a first valve element to close and open an area between one of the large diameter portion and the small diameter portion is fixed; a second valve stem having one end portion to which a second valve element to close and open an area between the other of the large diameter portions and the small diameter portion is fixed; a first bellows having one end portion fixed to a first bellows flange and the other end portion fixed to the first valve element; a second bellows having one end portion fixed to a second bellows flange and the other end portion fixed to the second valve element; a frame disposed outside the main passage; and an actuator to move the frame in the directions in which valve elements are closed and opened.

Flow dividing valve

Fluid control valve unit

A piezoelectric linear actuator comprising a laminated piezoelectric actuator having a cylindrical shape; a lower support member supporting the laminated piezoelectric actuator and extending laterally to the left and right of the laminated piezoelectric actuator; a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator; and an output part locked to the pair of displacement transfer members below the lower support member and coupling lower end portions of the displacement transfer members, wherein the pair of displacement transfer members are formed to have a width dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.

Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device

A gas divided flow supplying apparatus, including a control valve, a pressure type flow control unitconnected to a process gas inlet, a gas supply main pipeconnected to the downstream side of control valve, a plurality of branched pipe passagesconnected in parallel to the downstream side of main pipe, opening and closing valvesinterposed in the respective branched pipe passages, orificesprovided on the downstream sides of valves, a temperature sensorprovided near the process gas passage between the control valveand the orifices, a pressure sensorprovided in the process gas passage between the control valveand the orifices, divided gas flow outletsprovided on the outlet sides of the orifices, and an arithmetic and control unit

Gas divided flow supplying apparatus for semiconductor manufacturing equipment

Passage members each have a required width, a required height, and a required length, and are provided at middle portions in the width direction with fluid passages, respectively. As coupling means, two bolts are used. The middle portion in the width direction of each of the passage members has opposite end portions that are each provided with a female screw and a bolt insertion hole to be faced by the female screw, respectively. The upper bolt is inserted into one of the passage members and is screwed into the female screw of the other passage member. The lower bolt is inserted into the other passage member and is screwed into the female screw of the one of the passage members. The passage members are coupled with use of the two upper and lower bolts whereby a seal member is securely fixed.

Fixing structure for seal member in fluid control apparatus, joint, and fluid control apparatus

A pressure type flow control system with flow monitoring includes an inlet, a control valve including a pressure flow control unit connected downstream of the inlet, a thermal flow sensor connected downstream of the control valve, an orifice installed on a fluid passage communicatively connected downstream of the thermal flow sensor, a temperature sensor provided near the fluid passage between the control valve and orifice, a pressure sensor provided for the fluid passage between the control valve and orifice, an outlet communicatively connected to the orifice, and a control unit including a pressure type flow rate arithmetic and control unit receiving a pressure signal from the pressure sensor and a temperature signal from the temperature sensor, and a flow sensor control unit to which a flow rate signal from the thermal flow sensor is input.

Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same

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Osaka, Japan

Ryousuke Dohi