The Japan Steel Works, Ltd.

Osaka University

Showa Optronics Co., Ltd.

Ryotaro Togashi

Toshio Inami

Hideaki Kusama

Ryosuke Sato

Takahisa Jitsuno

Keiu Tokumura

Yoshiaki Aida

Tatsumi Goto

Tomonari Yahata

A laser optical system using optical fiber transmission, includes a first optical fiber for transmitting laser light emitted from a laser oscillator, a collimator lens for collimating laser light emitted from the first optical fiber, a spherical array lens including a plurality of cells for converging laser light emitted from the collimator lens into a plurality of spots, a plurality of second optical fibers each having a smaller core diameter than the first optical fiber and configured to admit the laser light converged into the corresponding spot by the spherical array lens, the second optical fibers having output ends that have mutually parallel axial lines and are arranged linearly in a single row, and a linearization optical unit for shaping laser light emitted from the second optical fibers into laser light having a linear cross section at an illuminated surface.

Laser optical system using optical fiber transmission

A laser crystallization method in which an amorphous silicon thin filmformed on a substrateis irradiated with a laser beam, the method including the steps of providing the amorphous silicon thin filmwith an absorbent to form an absorbent layeron the desired specific local areas of the amorphous silicon thin filmand laser annealing for crystallizing the specific local areas of the amorphous silicon thin filmby irradiating the amorphous silicon thin filmincluding the specific local areas with a semiconductor laser beam L having a specific wavelength absorbable by the absorbent layerand unabsorbable by the amorphous silicon thin filmfor heating the absorbent layer

Laser crystallization method for amorphous semiconductor thin film

Growing community of inventors

Hiroshima, Japan

Ryotaro Togashi