Hitachi High-tech Corporation

Alcare Co., Ltd.

Hitachi-high-technologies Corporation

Sony Semiconductor Solutions Corporation

Ryota Watanabe

Makoto Suzuki

Yuko Sasaki

Yuzuru Mizuhara

Osamu Matsumoto

Minoru Yamazaki

Akira Ikegami

Satoru Yamaguchi

Takeshi Yamazaki

Yuichi Iwase

Masayuki Ito

Kei Sakai

Daisuke Bizen

Kazunari Asao

Wataru Mori

Masafumi Miyake

Takushi Miyakawa

Takahiro Kumagai

Sangman Han

Kaori Bizen

Tomoya Tanaka

Takabumi Kubo

Tomohito Nakano

Wataru Okuyama

This charged particle beam device comprises: a charged particle beam source that generates charged particle beams; an objective lens in which coil current is inputted to focus the charged particle beams on a sample; a control unit that controls the coil current; a hysteresis characteristics storage unit that stores hysteresis characteristics information of the objective lens; a history information storage unit that stores history information relating to the coil current; and an estimating unit that estimates the magnetic field generated by the objective lens based on the coil current, the history information, and the hysteresis characteristic information, and has a magnetic field correction unit that, when the absolute value of the change amount of the coil current is greater than a prescribed value, further adds to the magnetic field estimated by the estimating unit a correction value according to the coil current and its change amount, correcting the magnetic field generated by the objective lens.

Charged particle beam device, and method for adjusting image capturing conditions in said charged particle beam device

There is provided an electrolyte analyzer that can appropriately replace consumable items while more exerting analysis processing performances than a conventional electrolyte analyzer does. An electrolyte analyzer includes a plurality of analysis chambershaving ISE electrodesconfigured to measure the concentration of the electrolyte of a sample and a controllerconfigured to control operations in the electrolyte analyzerincluding the analysis chambers. The ISE electrodesof the plurality of analysis chambersanalyze the same analysis items. The controllerselects an analysis chamberused for measurement from the plurality of analysis chamberscorresponding to the remaining measurable numbers of a plurality of ISE electrodesand measurement request status.

Electrolyte analyzer

The present technology relates to a light receiving device that includes a pixel array unit in which pixels each having a first tap detecting charge photoelectrically converted by a photoelectric conversion unit and a second tap detecting charge photoelectrically converted by the photoelectric conversion unit are two-dimensionally arranged in a matrix. In the pixel array unit, four vertical signal lines for outputting a detection signal detected by any one of the first tap and the second tap to the outside of the pixel array unit are arranged for one pixel column.

Light receiving device and distance measuring module

The automatic analyzer includes a first storage device that stores sample information including a measurement result of a reaction solution for each sample and a second storage device that stores the sample information on at least a part of the samples among the sample information stored in the first storage device, in which when the automatic analyzer reaches a predetermined operation state, the control device performs a backup process of backing up the sample information on the samples satisfying a predetermined backup condition from the first storage device to the second storage device, and deleting the sample information on the backed up samples from the first storage device.

Automatic analyzer

The present invention provides a foam having a surface which solates or gelates after absorption of water and appropriately absorbs the water. The foam is prepared by a foam reaction of a mixture comprising at least one polyol, a compound having at least one isocyanate group, and a hydrophilic polymer.

Foam and composition for foam

A charged particle beam apparatus acquires an image that is not affected by movement of a stage at a high speed. The apparatus includes: a charged particle source for irradiating a sample with a charged particle beam; a stage on which the sample is placed; a measurement unit for measuring a movement amount of the stage; a deflector; a deflector offset control unit, which is a feedback control unit for adjusting a deflection amount of the deflector according to the movement amount of the stage; a plurality of detectors for detecting secondary charged particles emitted from the sample by irradiation of the charged particle beam; a composition ratio calculation unit that calculates composition ratios of signals output from the detectors based on the deflection amount adjusted by the feedback control unit; and an image generation unit for generating a composite image by compositing the signals using the composition ratio.

Charged particle beam apparatus and control method

The present invention proposes a pattern measurement tool characterized by being provided with: a charged-particle beam sub-system having a tilt deflector; and a computer sub-system which is connected to the charged-particle beam sub-system and which is for executing measurement of a pattern on the basis of a signal obtained by said charged-particle beam sub-system, wherein the charged-particle beam sub-system acquires at least two signal profiles by scanning beams having at least two incidence angles, the computer sub-system measures the dimension between one end and the other end of the pattern on the basis of the at least two signal profiles, calculates the difference between the two measurements, and calculates the height of the pattern by inputting the difference value determined by said calculation into a relational formula indicating the relation between the height of the pattern and said difference value.

Pattern measurement device and non-transitory computer readable medium having stored therein program for executing measurement

The purpose of the present invention is to provide a charged particle beam device which adjusts brightness and contrast or adjusts focus and the like appropriately in a short time even if there are few detected signals. Proposed as an aspect for achieving this purpose is a charged particle beam device provided with: a detector for detecting charged particles obtained on the basis of irradiation of a specimen with a charged particle beam emitted from a charged particle source; and a control unit for processing a signal obtained on the basis of the output of the detector, wherein the control unit performs statistical processing on gray level values in a predetermined region of an image generated on the basis of the output of the detector, and executes signal processing for correcting a difference between a statistical value obtained by the statistical processing and reference data relating to the gray level values of the image.

Charged particle beam device

Provided are a dermal adhesive composed of a radiation-curable resin and capable of reducing stuffiness that causes rash or itch, a patch including the dermal adhesive, and a method for producing the dermal adhesive. Also provided is a porous membranous dermal adhesive formed through irradiation of a radiation-curable resin with radiation rays. Further provided is a patch including a base sheet and the dermal adhesive disposed on the base sheet. Still further provided is a method for producing a porous membranous dermal adhesive, the method including applying a dermal adhesive composition containing a radiation-curable resin to an adherend so as to form a porous membranous dermal adhesive, and irradiating the dermal adhesive composition with radiation rays.

Dermatological adhesive agent, patch material, and method for producing dermatological adhesive agent

An object of the invention is to provide a charged particle beam apparatus which can perform optimized adjustment of a focusing condition of a charged particle beam focused on a sample and optimized adjustment of an orbit of a charged particle emitted from the sample. In order to achieve the above-described object, there is provided a charged particle beam apparatus including a passage restriction member that partially restricts passage of a charged particle emitted from a sample, a first lens that is arranged between the passage restriction member and the sample, and that controls an orbit of the charged particle emitted from the sample, and a second lens that is arranged between the passage restriction member and the charged particle source, and that changes a focusing condition of the charged particle beam in accordance with a control condition of the first lens.

Growing community of inventors

Tokyo, Japan

Ryota Watanabe