Panasonic Corporation

Ryota Hamada

Tomohiro Murakoso

An alignment method is disclosed, in which a distance between a substrate and a photomask is set at a predetermined exposure gap. The photomask is rectangular, and includes a first side, and a second side opposite to the first side. A distance between a midpoint of the first side and the substrate is matched with the exposure gap. The photomask is rotated about, as an axis, a line that connects the midpoint of the first side and a midpoint of the second side to each other, whereby distances between both ends of the first side and the substrate are individually matched with the exposure gap. The photomask is rotated about the first side taken as an axis, whereby a distance between the midpoint of the second side and the substrate is matched with the exposure gap.

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Osaka, Japan

Ryota Hamada