Tokyo Electron Limited

Ryota Aoi

Kenichi Kobayashi

Takashi Asakawa

A display method includes storing, in a storage unit, first history information in which a processing is executed by a substrate processing apparatus based on a recipe; storing, in the storage unit, second history information in which an execution instruction for a job is received to instruct execution of the processing; and calculating, based on the first history information and the second history information, a first idle time indicating a time during which the processing is not performed and a second idle time indicating a time from an end of the job to a start of execution of a next job, and displaying the first idle time and the second idle time.

Display method and control device

An aggregation method includes: acquiring log information including a measurement value of a force used by a processing apparatus and a measurement date and time, the measurement value being measured by a sensor of the processing apparatus that processes a substrate; storing the measurement value of the force and the measurement date and time included in the acquired log information in a storage unit; and integrating the measurement value of the force associated with the measurement date and time in a specified aggregation period with reference to the storage unit to calculate an integrated value of the force for each processing apparatus.

Aggregation method and processing apparatus

A processing system includes: a first statistical operator configured to divide data output from each sensor of a target apparatus according to each processing division of a processing performed by the target apparatus, and perform a statistical operation for each processing division; a second statistical operator configured to divide data output from each sensor of a comparative apparatus according to each processing division of the processing performed by the comparative apparatus, and perform a statistical operation for each processing division; a calculator configured to calculate a difference value between a result of the statistical operation performed by the first statistical operator and a result of the statistical operation performed by the second statistical operator, for each processing division; and a display controller configured to display the difference value for each processing division in a graph.

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Hokkaido, Japan

Ryota Aoi