Canon Kabushiki Kaisha

Jsw Aktina System Co., Ltd.

Subaru Corporation

Ryosuke Sato

Toshiki Takeuchi

Susumu Hirosawa

Kenji Sugiyama

Atsushi Sakamoto

Suk-Hwan Chung

Kohei Fukui

Masahiro Sugimoto

Kenichi Ohmori

Hiroshi Fujisawa

Hokuto Yamane

Toshiyuki Ichiki

Katsunori Naganuma

Masato Izumi

Taku Sagara

Nobuo Oku

Yuzaburo Ota

A laser processing device and a laser processing method that are capable of forming a high-quality semiconductor film are provided. An ELA device (excimer laser annealing device) () includes a laser oscillator () that generates laser light for forming a polysilicon film by irradiating an amorphous silicon film over a substrate to be processed with the laser light, a pulse measuring instrument () for detecting first partial light and second partial light contained in the laser light, and a monitoring device () for comparing a detection result of the first partial light with a detection result of the second partial light.

Laser processing device and laser light monitoring method

A power transmitting apparatus, in a case where at least one of a transmission power measured in one state from among a plurality of different states or a received power obtained in the one state is unstable, does not use the transmission power and the received power in calculating the parameter used in determining whether or not an object not an intended power transmission target exists.

Power transmitting apparatus, control method for power transmitting apparatus, and storage medium

A power transmission apparatus wirelessly communicates with a power reception apparatus using an antenna, wirelessly transmits power to the power reception apparatus using the antenna, measures, in a period during which the transmission of the power is stopped, one or both of a voltage and a current output from the antenna, performs, based on a measurement result obtained by the measurement, a determination process for determining that an object different from the power reception apparatus is present, restricts, in a case where it is determined that an object different from the power reception apparatus is present as a result of the determination process performed by the first determination unit, the transmission of the power, and controls the first determination unit not to use in the determination process the measurement result obtained by the measurement in a period during which communication is performed.

Power transmission apparatus, method for controlling power transmission apparatus, and recording medium

In a case where a power receiving apparatus detected by communication with a first communication unit, and an apparatus performing communication based on a standard of Near Field Communication (NFC) that has been detected by communication with a second communication unitare the same apparatuses, a control unit controls a power transmitting unit to perform power transmission with higher power than power used in a case where the power receiving apparatus and the apparatus are not the same apparatuses.

Power transmitting apparatus with ability to appropriately limit power transmission, control method for power transmitting apparatus, and storage medium thereof

A laser annealing apparatus according to an embodiment includes a laser light source, an annealing optical system, a linear irradiation region along a Y-direction, a moving mechanism configured to change a relative position of the irradiation region with respect to the substrate along an X-direction, an illumination light source configured to generate illumination light for illuminating the substrate along a third direction, and a detector configured to detect detection light reflected, in a fourth direction, on the substrate illuminated by the illumination light so as to photograph an annealed part of the substrate in a linear field of view along the Y-direction. In a YZ-plane view, the third direction is inclined from the vertical direction and the fourth direction is inclined from the vertical direction.

Laser annealing apparatus, laser annealing method, and method for manufacturing semiconductor device

A rotary-wing aircraft includes a fuselage, and an external device. The fuselage is provided with a rotary wing. The external device is mounted on the outside of the fuselage. The external device includes a mounting device, a mass variation device, and a damper. The mounting device is fixed to the fuselage and disposed so as to project in a lateral direction of the fuselage. The mass variation device is mounted on the mounting device and has mass that varies as the mass variation device is used. The damper couples the fuselage to the mounting device and supports the mounting device. The damper includes a stiffness variable mechanism configured to change stiffness of the damper in response to variation in the mass of the mass variation device.

Rotary-wing aircraft

Growing community of inventors

Tokyo, Japan

Ryosuke Sato