Tdk Corporation

Sumco Corporation

Ryosuke Kido

Hiroshi Takai

Takeshi Kuroiwa

A carrier measuring device includes a rotary table, a table drive motor, an upper thickness sensor, a lower thickness sensor and a slide unit. The rotary table includes a carrier receiver configured to horizontally house a carrier formed with a hole in which a semiconductor wafer is held, the hole being eccentric with respect to the carrier. The table drive motor rotates the rotary table around a center axis thereof as a rotation axis. The upper thickness sensor and the lower thickness sensor are positioned above and below the carrier, respectively, and measure a thickness of the carrier in a non-contact manner. The slide unit slides the rotary table in a horizontal direction. The carrier receiver is formed to be capable of housing the carrier in a manner that a center of the hole coincides with a center of the rotary table.

Carrier measurement device, carrier measurement method, and carrier management method

A lithium ion secondary battery includes: a positive electrode, a negative electrode, a separator located between the positive electrode and the negative electrode, and an electrolytic solution. The negative electrode includes a negative electrode active material which contains silicon oxide and a compound containing a first element. The electrolytic solution contains an imide salt which contains the first element and an imide anion. The first element is any one or more elements selected from the group consisting of K, Na, Mg, Ca, Cs, Al, and Zn.

Growing community of inventors

Tokyo, Japan

Ryosuke Kido