Shin-Etsu Chemical Co., Ltd.

Ryoji Iida

Noriaki Hamaya

Noboru Yamamoto

Koji Nakamura

A sprayed article is prepared by thermally spraying ceramic particles of rare earth oxide or fluoride or metal particles of W, Mo or Ta onto an outer or inner surface of a cylindrical carbon substrate to form a sprayed coating, and burning out the carbon substrate, thus leaving the ceramic or metal-base sprayed coating of cylindrical shape having a wall thickness of 0.5-5 mm.

Sprayed article and making method

A rare earth oxide-containing sprayed plate is prepared by thermally spraying a rare earth oxide on a support to a thickness of up to 5 mm and peeling the sprayed coating from the support. Thin plates of rare earth oxide ceramics can be prepared without molding, firing and sintering steps.

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Echizen, Japan

Ryoji Iida